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Measurement of Composition and Thickness for Single Layer Coating with Energy Dispersive XRF Analysis

Published online by Cambridge University Press:  06 March 2019

Robert Shen  and
Alan Sandborg
Robert Shen
Affiliation:
EDAX Laboratories, EDAX International, Inc., Prairie View, IL 60069
Alan Sandborg
Affiliation:
EDAX Laboratories, EDAX International, Inc., Prairie View, IL 60069
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Extract

Methods for rapid and accurate analysis of coating composition and thickness are of major importance for the semiconductor industry. Typical coating problems are Al, Au or Pt coatings on metal and Cr/Ni alloy or SiO2/P2O5 glass on Si wafers. Due to the nature of the coatings ana tne variety of elements, a software package, COAT95 has been developed to cover the following three possible situations:

  • 1. Single element coating for thickness only.

  • 2. Compound, elements A and B, coating on substrate element S, for composition and thickness.

  • 3. Compound, elements A and S, coating on substrate element S , for composition and thickness.

The main goal of the COAT95 software is to have all possible models for the single layer coating problems of the semiconductor industry.

Type
VIII. XRF General Applications
Information
Advances in X-Ray Analysis , Volume 26: Thirty-First Annual Conference on Applications of X-ray Analysis, August 1-6, 1982 , 1982 , pp. 431 - 436
Copyright
Copyright © International Centre for Diffraction Data 1982

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