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SU8 ridge-gap waveguide resonator

Published online by Cambridge University Press:  12 May 2014

Sofia Rahiminejad ,
Elena Pucci ,
Sjoerd Haasl  and
Peter Enoksson
Sofia Rahiminejad*
Affiliation:
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Kemivagen 9, 412 96 Gothenburg, Sweden
Elena Pucci
Affiliation:
Department of Signals and Systems, Chalmers University of Technology, Hörsalsvägen 11, 412 96 Gothenburg, Sweden
Sjoerd Haasl
Affiliation:
School of Technology and Health, Royal Institute of Technology, 14152 Stockholm, Sweden
Peter Enoksson
Affiliation:
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Kemivagen 9, 412 96 Gothenburg, Sweden
*
Corresponding author: S. Rahiminejad Email: rahimine@chalmers.se
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Abstract

In this paper, we present the first ridge-gap waveguide resonator made with a polymer base. It is designed for the frequency range 220–325 GHz, and is fabricated solely using a Au coated two-layer SU8-based process. The design is based on previous work done with Si. The new process has advantages such as fewer and cheaper process steps. The SU8 ridge-gap waveguide resonator is made in order to obtain attenuation characteristics via the measured Q-factor of the resonator. The ridge-gap waveguide resonator has the same dimensions as the previous one fabricated in Si, and the same thickness of the Au coating. The SU8-based resonator shows an attenuation loss of 0.41 dB/mm at 282.2 GHz compared to the Si-based resonator with an attenuation loss of 0.043 dB/mm at 283.5 GHz. This makes the SU8 process a more cost-effective alternative to the Si process

Keywords

RF-MEMS and MOEMSNew and emerging technologies and materials
Type
Research Papers
Information
International Journal of Microwave and Wireless Technologies , Volume 6 , Issue 5: MEMSWAVE Symposium 2013 , October 2014 , pp. 459 - 465
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2014 

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References

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