Hostname: page-component-cd9895bd7-7cvxr Total loading time: 0 Render date: 2024-12-28T17:21:23.239Z Has data issue: false hasContentIssue false
  • English
  • Français

SU8 ridge-gap waveguide resonator

Published online by Cambridge University Press:  12 May 2014

Sofia Rahiminejad ,
Elena Pucci ,
Sjoerd Haasl  and
Peter Enoksson
Sofia Rahiminejad*
Affiliation:
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Kemivagen 9, 412 96 Gothenburg, Sweden
Elena Pucci
Affiliation:
Department of Signals and Systems, Chalmers University of Technology, Hörsalsvägen 11, 412 96 Gothenburg, Sweden
Sjoerd Haasl
Affiliation:
School of Technology and Health, Royal Institute of Technology, 14152 Stockholm, Sweden
Peter Enoksson
Affiliation:
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Kemivagen 9, 412 96 Gothenburg, Sweden
*
Corresponding author: S. Rahiminejad Email: rahimine@chalmers.se
Get access Rights & Permissions [Opens in a new window]

Abstract

In this paper, we present the first ridge-gap waveguide resonator made with a polymer base. It is designed for the frequency range 220–325 GHz, and is fabricated solely using a Au coated two-layer SU8-based process. The design is based on previous work done with Si. The new process has advantages such as fewer and cheaper process steps. The SU8 ridge-gap waveguide resonator is made in order to obtain attenuation characteristics via the measured Q-factor of the resonator. The ridge-gap waveguide resonator has the same dimensions as the previous one fabricated in Si, and the same thickness of the Au coating. The SU8-based resonator shows an attenuation loss of 0.41 dB/mm at 282.2 GHz compared to the Si-based resonator with an attenuation loss of 0.043 dB/mm at 283.5 GHz. This makes the SU8 process a more cost-effective alternative to the Si process

Keywords

RF-MEMS and MOEMSNew and emerging technologies and materials
Type
Research Papers
Information
International Journal of Microwave and Wireless Technologies , Volume 6 , Issue 5: MEMSWAVE Symposium 2013 , October 2014 , pp. 459 - 465
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2014 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1]Shang, X.; Ke, M.; Wang, Y.; Lancaster, M.J.: WR-3 and waveguides and filters fabricated using SU8 photoresist micromachining technology. IEEE Transact. Terahertz Sci. Technol., 2 (2012), 629–637.Google Scholar
[2]Silveirinha, M.G.; Fernandes, C.A.; Costa, J.R.: Electromagnetic characterization of textured surfaces formed by metallic pins. IEEE Transact. Antennas Propag., 56 (2008), 405–415.Google Scholar
[3]Rajo-Iglesias, E.; Kildal, P.-S.: Numerical studies of bandwidth of parallel-plate cut-off realised by a bed of nails, corrugations and mushroom-type electromagnetic bandgap for use in gap waveguides. IET Microw. Antennas Propag., 5 (2011), 282–289.Google Scholar
[4]Kildal, P.-S.; Alfonso, E.; Valero-Nogueira, A.; Rajo-Iglesias, E.: Local metamaterial-based waveguides in gaps between parallel metal plates. IEEE Antennas Wirel. Propag. Lett., 8 (2009), 84–87.Google Scholar
[5]Kildal, P.-S.; Zaman, A.U.; Rajo-Iglesias, E.; Alfonso, E.; Valero-Nogueira, A.: Design and experimental verification of ridge gap waveguide in bed of nails for parallel-plate mode suppression. IET Microw. Antennas Propag., 5 (2011), 262–270.Google Scholar
[6]Zaman, A.U.; Kildal, P-S.; Kishk, A.A.: Narrow-band microwave filter using high-Q groove gap waveguide resonators with manufacturing flexibility and no sidewalls. IEEE Transact. Compon. Packag. Manuf. Technol., 2 (2012), 1882–1889.Google Scholar
[7]Zaman, A.U.; Alexanderson, M.; Vukusic, T.; Kildal, P.-S.: Gap waveguide PMC packaging for improved isolation of circuit components in high frequency microwave modules. IEEE Transact. Compon. Packag. Manuf. Technol., 4 (2013), 16–25.CrossRefGoogle Scholar
[8]Rahiminejad, S. et al. Micromachined ridge gap waveguide and resonator for millimeter-wave applications. Sens. Actuators A Phys., 186 (2012), 264–269.Google Scholar
[9]Rahiminejad, S.; Pucci, E.; Haasl, S.; Enoksson, P.: Contactless pin-flange adapter for high-frequency measurements, 23rd Micromechanics and Microsystems Europe Workshop, Ilmenau, Germany, 2012.Google Scholar
[10]Rahiminejad, S.; Pucci, E.; Haasl, S.; Enoksson, P.: Micromachined double-sided SOI pin-flange adapter for 100 GHz, 24th Micromechanics And Microsystems Europe Workshop, Espoo, Finland, 2013.CrossRefGoogle Scholar
[11]Rahiminejad, S.; Raza, H.; Zaman, A.U.; Haasl, S.; Enoksson, P.; Kildal, P.-S.: Micromachined gap waveguides for 100 GHz applications, In 7th European Conf. Antennas and Propagation (EuCAP), Gothenburg, Sweden, 2013.Google Scholar
[12]Rahiminejad, S. et al. 100 GHz SOI gap waveguides, In The 17th Int. Conf. Solid-State Sensors, Actuators and Microsystems, Barcelona, Spain, 2013.Google Scholar
[13]Chollet, F.: Welcome to MEMScyclopedia.org!, 18 Nov. 2013, http://memscyclopedia.org/su8.html.Google Scholar
[14]Pucci, E.; Rajo-Iglesias, E.; Kildal, P.-S.: New microstrip gap waveguide on mushroom-type EBG for packaging of microwave components. IEEE Microw. Wirel. Compon. Lett., 22 (2012), 129–131.CrossRefGoogle Scholar
[15]Pucci, E.; Zaman, A.U.; Rajo-Iglesias, E.; Kildal, P.-S.; Kishk, A.: Study of Q-factors of ridge and groove gap waveguide resonators. IET Microw. Antennas Propag., 7 (2013), 900–908.Google Scholar