Hostname: page-component-cd9895bd7-dk4vv Total loading time: 0 Render date: 2024-12-28T15:03:56.039Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterization of pulsed laser deposited MoS2 by transmission electron microscopy

Published online by Cambridge University Press:  03 March 2011

S.D. Walek ,
M.S. Donley ,
J.S. Zabinski  and
V.J. Dyhouse
S.D. Walek
Affiliation:
WL/MLBT, Materials Directorate, Wright-Patterson Air Force Base, Ohio 45433-6533
M.S. Donley
Affiliation:
WL/MLBT, Materials Directorate, Wright-Patterson Air Force Base, Ohio 45433-6533
J.S. Zabinski
Affiliation:
WL/MLBT, Materials Directorate, Wright-Patterson Air Force Base, Ohio 45433-6533
V.J. Dyhouse
Affiliation:
Research Institute, University of Dayton, Dayton, Ohio 45469-0168
Get access

Abstract

Molybdenum disulfide is a technologically important solid phase lubricant for vacuum and aerospace applications. Pulsed laser deposition of MoS2 is a novel method for producing fully dense, stoichiometric thin films and is a promising technique for controlling the crystallographic orientation of the films. Transmission electron microscopy (TEM) of self-supporting thin films and cross-sectional TEM samples was used to study the crystallography and microstructure of pulsed laser deposited films of MoS2. Films deposited at room temperature were found to be amorphous. Films deposited at 300 °C were nanocrystalline and had the basal planes oriented predominately parallel to the substrate within the first 12–15 nm of the substrate with an abrupt upturn into a perpendicular (edge) orientation farther from the substrate. Spherically shaped particles incorporated in the films from the PLD process were found to be single crystalline, randomly oriented, and less than about 0.1 μm in diameter. A few of these particles, observed in cross section, had flattened bottoms, indicating that they were molten when they arrived at the surface of the growing film. Analytical electron microscopy (AEM) was used to study the chemistry of the films. The x-ray microanalysis results showed that the films have the stoichiometry of cleaved single crystal MoS2 standards.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 11 , November 1993 , pp. 2933 - 2941
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Roberts, E. W., Thin Solid Films 181, 461 (1989).CrossRefGoogle Scholar
2Roberts, E. W. and Price, W. B., in New Materials Approaches to Tribology: Theory and Applications, edited by Pope, L. E., Fehrenbacher, L., and Winer, W. O. (Mater. Res. Soc. Symp. Proc. 140, Pittsburgh, PA, 1989), p. 251.Google Scholar
3Hilton, M. R. and Fleischauer, P. D., in New Materials Approaches to Tribology: Theory and Applications, edited by Pope, L. E., Fehrenbacher, L., and Winer, W. O. (Mater. Res. Soc. Symp. Proc. 140, Pittsburgh, PA, 1989), p. 227.Google Scholar
4Donley, M. S., Murray, P. T., Barber, S. A., and Haas, T. W., Surf. Coat. Technol. 36, 329 (1988).CrossRefGoogle Scholar
5Zabinski, J. S., Donley, M. S., John, P. J., Dyhouse, V. J., Safriet, A., and McDevitt, N. T., in Surface Chemistry and Beam-Solid Interactions, edited by Atwater, H. A., Houle, F. A., and Lowndes, D. H. (Mater. Res. Soc. Symp. Proc. 201, Pittsburgh, PA, 1991), p. 195.Google Scholar
6Donley, M. S., Zabinski, J. S., Dyhouse, V. J., John, P. J., Murray, P. T., and McDevitt, N. T., Lecture Notes on Physics, edited by Miller, J. C. and Haglund, R. F. Jr. (Springer-Verlag, New York, 1991), Vol. 389, pp. 271–279.Google Scholar
7Donley, M. S., McDevitt, N. T., Haas, T. W., Murray, P. T., and Grant, J. T., Thin Solid Films 168, 335 (1989).CrossRefGoogle Scholar
8Donley, M. S., Murray, P. T., and McDevitt, N. T., in New Materials Approaches to Tribology: Theory and Applications, edited by Pope, L. E., Fehrenbacher, L., and Winer, W. O. (Mater. Res. Soc. Symp. Proc. 140, Pittsburgh, PA, 1989), p. 277.Google Scholar
9McDevitt, N. T., Donley, M. S., and Zabinski, J. S., Wear 166, 65–72 (1993).CrossRefGoogle Scholar
10Bravman, J. C. and Sinclair, R., J. Electron Micros. Technol. 1, 53 (1984).CrossRefGoogle Scholar
11Cliff, G. and Lorimer, G. W., J. Microsc. 103, 203 (1975).CrossRefGoogle Scholar
12Bertrand, P. A., J. Mater. Res. 4, 180 (1989).CrossRefGoogle Scholar
13Hilton, M. R. and Fleischauer, P. D., J. Mater. Res. 5, 406 (1990).CrossRefGoogle Scholar
14Moser, J. and Lévy, F., J. Mater. Res. 7, 734 (1992).CrossRefGoogle Scholar
15Seitzman, L. E., Bolster, R. N., and Singer, I. L., Surf. Coat. Technol. 52, 93 (1992).CrossRefGoogle Scholar
16Murray, P. T., Dyhouse, V. J., Grazulis, L., and Thomas, D. R., in Surface Chemistry and Beam-Solid Interactions, edited by Atwater, H. A., Houle, F. A., and Lowndes, D. H. (Mater. Res. Soc. Symp. Proc. 201, Pittsburgh, PA, 1991), p. 513.Google Scholar
17Smidt, F. A., Int. Mater. Rev. 35 (2), 61 (1990).CrossRefGoogle Scholar