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Characterization of the mechanical properties of a–SiC: H films

Published online by Cambridge University Press:  03 March 2011

M.J. Loboda  and
M.K. Ferber
M.J. Loboda
Affiliation:
Dow Corning Corporation, Midland, Michigan 48686-0994
M.K. Ferber
Affiliation:
High Temperature Materials Laboratory, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6062
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Abstract

Amorphous hydrogenated silicon carbide (a–SiC: H) thin films (t < 1 μm) were grown from two different precursor gases, a methane/silane mixture and silacyclobutane (SiC3H8). Plasma enhanced chemical vapor deposition was used to deposit a–SiC: H thin films on silicon substrates at temperatures of 175 °C and 600 °C. These a–SiC: H films were characterized using the mechanical properties microprobe (nanoindenter) and by scratch testing. Data and mechanical properties information collected from these measurements have been correlated with film process conditions and materials characteristics. A simplified approach was used to calculate the average nanoindentation hardness from shallow indentations. Using this technique, results for a silicon wafer are in good agreement with that previously reported. Analysis of the substrate influence on the thin film nanoindentation data implies that the measured hardness is relatively unaffected by the substrate, while the measured elastic properties are somewhat influenced by the substrate. The a–SiC: H film hardness is shown to depend on the precursor gas and molecular bonding, while the elastic properties vary with precursor gas, composition, and density, as influenced by the plasma source deposition power. The MPM data and scratch test data show similar correlations to plasma source power, film structure, and film composition.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 11 , November 1993 , pp. 2908 - 2915
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1Pethica, J. B., Hutchings, R., and Oliver, W. C., Philos. Mag. A 48, 593 (1983).CrossRefGoogle Scholar
2Doerner, M. F. and Nix, W. D., J. Mater. Res. 1, 601 (1986).CrossRefGoogle Scholar
3Baba, S., Kikuchi, A., and Kinbara, A., J. Vac. Sci. Technol. A 4(6), 3015 (1986).CrossRefGoogle Scholar
4Wu, T. W., J. Mater. Res. 6, 407 (1991).CrossRefGoogle Scholar
5Loboda, M. J., Amorphous and Crystalline Silicon Carbide and Related Materials IV (Proc. in Physics, Vol. 71), edited by Yang, C. Y. and Harris, G. L. (Springer-Verlag, New York, 1992), p. 271.Google Scholar
6Loboda, M. J., Baumann, S., Edgell, M. J., and Stolt, K., J. Vac. Sci.Tehnol. A 10 (6), 3532 (1992).Google Scholar
7Taylor, J. A., J. Vac. Sci. Technol. A 9 (4), 2464 (1991).CrossRefGoogle Scholar
8Weppelmann, E. R., Field, J. S., and Swain, M. V., J. Mater. Res. 8, 830 (1993).CrossRefGoogle Scholar
9Perry, A. J., Thin Solid Films 78, 77 (1981).CrossRefGoogle Scholar
10Baba, S., Kikuchi, A., and Kinbara, A., J. Vac. Sci. Technol. A 5 (4), 1860 (1987).CrossRefGoogle Scholar
11Buckle, H., The Science of Hardness Testing and Its Research Applications, edited by Westbrook, J. W. and Conrad, H. (ASM, Metals Park, OH, 1973), p. 453.Google Scholar
12Lebouvier, D., Gilormini, P., and Felder, E., J. Phys. D 18, 199 (1985).CrossRefGoogle Scholar
13Pollock, H. M., Maugis, D., and Barquins, M., in Microindentation Techniques in Materials Science and Engineering, edited by Blau, P. J. and Lawn, B. R. (ASTM Special Technical Publication 889, ASTM, Philadelphia, PA, 1986), p. 47.Google Scholar
14Bull, S. J. and Rickerby, D. S., Surf. Coat. Technol. 42, 149 (1990).CrossRefGoogle Scholar
15Bowden, F. P. and Tabor, D., Friction and Lubrication of Solid Surfaces (Oxford University Press, Oxford, 1964), Chap. 16.Google Scholar
16Lawn, B. R., Evans, A. G., and Marshall, D. B., J. Am. Ceram. Soc. 63, 574 (1980).CrossRefGoogle Scholar
17Laugier, M. T., J. Mater. Sci. Lett. 4, 1539 (1985).CrossRefGoogle Scholar
18Hill, R., The Mathematical Theory ofPlasticity (Oxford University Press, London, 1950), Chap. 5.Google Scholar
19Marsh, D. M., Proc. R. Soc. London, Ser. A 279, 420 (1964).Google Scholar
20Samuels, L. E. and Mulhern, T. O., J. Mech. Phys. Solids 5, 125 (1957).CrossRefGoogle Scholar