Published online by Cambridge University Press: 31 January 2011
Atomic force microscopy (AFM) nanoindentation experiments were performed on a Co(10.1) monocrystal. Using AFM line scans, we deduced the elastic recovery, which is an intrinsic parameter of the studied material. The comparison of these elastic recovery values with those calculated by standard nanoindentation shows a fair agreement for forces higher than 400 μN with an important discrepancy for lower forces. This difference is attributed to tip shape effects and to the AFM cantilever elastic deformation. Furthermore, the material hardness was measured from AFM images of the imprint by considering the lateral dimension L. In this case, the obtained values are practically independent from the applied load. Moreover, a simple model based on geometrical considerations is proposed to correct hardness values calculated from the residual depth.