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Fatigue of ferroelectric PbZrxTiyO3 capacitors with Ru and RuOx electrodes

Published online by Cambridge University Press:  18 February 2016

S. D. Bernstein ,
T. Y. Wong ,
Yanina Kisler  and
R. W. Tustison
S. D. Bernstein
Affiliation:
Research Division, Raytheon Company, Lexington, Massachusetts 02173
T. Y. Wong
Affiliation:
Research Division, Raytheon Company, Lexington, Massachusetts 02173
Yanina Kisler
Affiliation:
Research Division, Raytheon Company, Lexington, Massachusetts 02173
R. W. Tustison
Affiliation:
Research Division, Raytheon Company, Lexington, Massachusetts 02173
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Extract

The fatigue behavior of ferroelectric PZT capacitors with Ru and RuOx electrodes was studied. These capacitors show no sign of fatigue out to 1 X 1011 cycles, in sharp contrast to the degradation typically observed with Pt electrodes. Compared to Pt electrodes, the initial polarization was lower, but after fatiguing the polarization was comparable to or larger than that for Pt electrodes. Differences in polarization in response to switching and nonswitching pulses greater than 10 μC/cm2 were observed at 1 X 1011 cycles.

Type
Research Article
Information
Journal of Materials Research , Volume 8 , Issue 1 , January 1993 , pp. 12 - 13
Copyright
Copyright © Materials Research Society 1993

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