Hostname: page-component-cd9895bd7-hc48f Total loading time: 0 Render date: 2024-12-28T19:05:57.531Z Has data issue: false hasContentIssue false
  • English
  • Français

Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method

Published online by Cambridge University Press:  03 March 2011

Takeshi Morita ,
Yasuo Wagatsuma ,
Hitoshi Morioka ,
Hiroshi Funakubo ,
Nava Setter  and
Yasuo Cho
Takeshi Morita*
Affiliation:
Research Institute of Electrical Communication, Tohoku University, Miyagi 980-8577, Japan
Yasuo Wagatsuma
Affiliation:
Research Institute of Electrical Communication, Tohoku University, Miyagi 980-8577, Japan
Hitoshi Morioka
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8502, Japan
Hiroshi Funakubo
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8502, Japan
Nava Setter
Affiliation:
Ceramics Laboratory, Faculty of Engineering, Material Institute, Swiss Federal Institute of Technology (EPFL), CH-1015 Lausanne, Switzerland
Yasuo Cho
Affiliation:
Research Institute of Electrical Communication, Tohoku University, Miyagi 980-8577, Japan
*
a) Address all correspondence to this author. e-mail: tmorita@ieee.org
Get access

Abstract

Deposition of thin films via hydrothermal method has various advantages: low deposition temperature, high purity, deposition on a three-dimensional structure,and a large thickness. Although an epitaxial lead zirconate titanate (PZT) thin-film deposition has been reported, the ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The current paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, a 200-nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin film was deposited on SrRuO3. The remanent polarization 2Pr and coercive electric field for PZT on SrRuO3/SrTiO3 (001) were 17.1 μC/cm2 and 36 kV/cm, respectively, and those of PZT on SrRuO3/SrTiO3 (111) were 32.7 μC/cm2 and 59 kV/cm, respectively. The reason for large imprint electrical field, 91 kV/cm and 40 kV/cm for each film, was unclear at this stage, although it is associated with self–alignment poling direction. This self–alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.

Keywords

HydrothermalEpitaxyThin film
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 6 , June 2004 , pp. 1862 - 1868
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Morita, T.: Miniature piezoelectric motor. Sens. Actuators 103, 291 (2003).Google Scholar
2Ledermann, N., Muralt, P., Baborowski, J., Gentil, S., Mukati, K., Cantoni, M., Seifert, A. and Setter, N.: 100-Textured, piezoelectric Pb(Zrx, Ti1-x)O3 thin films for MEMS: Integration, deposition and properties. Sens. Actuators, A 105, 162 (2003).CrossRefGoogle Scholar
3Guerrero, C., Roldan, J., Ferrater, C., Garcia-Cuenca, M.V., Sanchez, F. and Varela, M.: Growth and characterization of epitaxial ferroelectric PbZrxTi1-xO3 thin film capacitors with SrRuO3 electrodes for non-volatile memory applications. Solid-State Electron. 45, 1433 (2001).Google Scholar
4Kim, J.H., Kim, Y., Chien, A.T. and Lange, F.F.: Epitaxial growth of PbZr0.5Ti0.5O3 thin films on SrRuO3/SrTiO3 substrates using chemical solution deposition: Microstructural and ferroelectric properties. J. Mater. Res. 16, 1739 (2001).CrossRefGoogle Scholar
5T, T. Oikawa, Aratani, M., Saito, K. and Funakubo, H.: Composition dependence of ferroelectric properties of epitaxial Pb(ZrxTi1-x)O3 thin films grown by metalorganic chemical vapor deposition. J. Cryst. Growth 237, 455 (2002).Google Scholar
6Kanno, I., Kotera, H., Wasa, K., Matsunaga, T., Kamada, T. and Takayama, R.: Crystallographic characterization of epitaxial Pb(ZrxTi1-x)O-3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering. J. Appl. Phys. 93, 4091 (2003).Google Scholar
7Shimomura, K., Tsurumi, T., Ohba, Y. and Daimon, M.: Preparation of lead zirconate titanate thin-film by hydrothermal method. Jpn. J. Appl. Phys. 30, 2174 (1991).CrossRefGoogle Scholar
8Morita, T., Kanda, T., Yamagata, Y., Kurosawa, M.K. and Higuchi, T.: Single process to deposit PZT thin film by hydrothermal method. Jpn. J. Appl. Phys. 36, 2998 (1997).Google Scholar
9Morita, T., Kurosawa, M.K. and Higuchi, T.: Cylindrical micro ultrasonic motor using PZT thin film deposited by single process hydrothermal method (ϕ 2.4mm, L10mm Stator Transducer). IEEE Trans. Ultrasonic, Ferroelectrics, and Frequency Control 45, 1178 (1998).CrossRefGoogle Scholar
10Morita, T., Kurosawa, M.K. and Higuchi, T.: A cylindrical shaped micro ultrasonic motor utilizing PZT thin film. Sens. Actuators 83, 225 (2000).CrossRefGoogle Scholar
11Kanda, T., Morita, T., Kurosawa, M.K., and Higuchi, T.: Estimation of resolution and contact force of a longitudinally vibrating touch probe sensor using PZT thin-film vibrator. Jpn. J. Appl. Phys. 40, 3646 (2001).CrossRefGoogle Scholar
12Chien, A.T., Speck, J.S. and Lange, F.F.: Hydrothermal synthesis of heteroepitaxial Pb(ZrxTi1-x)O3 thin film at 90-150. J. Mater. Res. 12, 1176 (1997).CrossRefGoogle Scholar
13Oledzka, M., Lencka, M.M., Pinceloup, P., Mikulka-Bolen, K.L.E., McCandlish, and Riman, R.E.: Influence of precursor on microstructure and phase composition of epitaxial hydrothermal PbZr0.7Ti0.3O3 films. Chem. Mater. 15, 1090 (2003).Google Scholar
14Takahashi, K., Oikawa, T., Saito, K., Kaneko, S., Fujisawa, H, Shimizu, M., and Funakubo, H.: Effect of strain in epitaxially grown SrRuO3 thin films on crystal structure and electric properties. Jpn. J. Appl. Phys. 41, 5376 (2002).Google Scholar
15Cho, Y., Kazuta, S. and Matsuura, K.: Scanning nonlinear dielectric microscopy with nanometer resolution. Appl. Phys. Lett. 75, 2833 (1999).Google Scholar
16Guerrero, C., Roldan, J., Ferrater, C., Garcia-Cuenca, M.V., Sanchez, F. and Varela, M.: Growth and characterization of epitaxial ferroelectric PbZrxTi1-xO3 thin film capacitors with SrRuO3 electrodes for non-volatile memory applications. Solid-State Electronics 45, 1433 (2001).Google Scholar