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Formation of multilayer films for gas sensing by in situ thermophoretic deposition of nanoparticles from aerosol phase

Published online by Cambridge University Press:  03 March 2011

Thorsten Sahm ,
Weizhi Rong ,
Nicolae Bârsan ,
Lutz Mädler ,
Sheldon K. Friedlander  and
Udo Weimar
Thorsten Sahm*
Affiliation:
Institute of Physical Chemistry, University of Tuebingen, Tuebingen 72076, Germany
Weizhi Rong
Affiliation:
Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095-1592
Nicolae Bârsan
Affiliation:
Institute of Physical Chemistry, University of Tuebingen, Tuebingen 72076, Germany
Lutz Mädler
Affiliation:
Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095-1592
Sheldon K. Friedlander
Affiliation:
Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095-1592
Udo Weimar
Affiliation:
Institute of Physical Chemistry, University of Tuebingen, Tuebingen 72076, Germany
*
a) Address all correspondence to this author. e-mail: thorsten.sahm@ipc.uni-tuebingen.de This paper was selected as the Outstanding Meeting Paper for the 2006 MRS Spring Meeting Symposium R Proceedings, Vol. 915.
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Abstract

Dry aerosol synthesis applying the flame spray pyrolysis was used to manufacture and directly (in situ) deposit tin dioxide nanoparticles on sensor substrates. For the first time this technique was used to synthesize a combination of two porous layers for gas-sensor fabrication. Two different sensing layers were deposited on ceramic substrates, i.e., pure tin dioxide and palladium-doped tin dioxide. The top layer was a palladium-doped alumina as a filter. The fabricated sensors were tested with methane, CO, and ethanol. In the case of CH4, the pure tin dioxide sensor with the Pd/Al2O3 filter showed higher sensor signals and improved selectivity with respect to water vapor compared to single tin dioxide films. At temperatures up to 250 °C the Pd doping of the tin dioxide strongly increased the sensitivity to all gases. At higher temperatures the sensor signal significantly decreased for the Pd/SnO2 sensor with a Pd/Al2O3 filter, indicating high catalytic activity.

Keywords

Flame synthesisSensorSemiconducting
Type
Outstanding Meeting Papers:Review
Information
Journal of Materials Research , Volume 22 , Issue 4 , April 2007 , pp. 850 - 857
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

1Heiland, G.: About the influence of hydrogen on the surface conductivity of the zinc oxide crystals. Z. Phys. 148, 15 (1957).Google Scholar
2Bielanski, A., Deren, J., and Haber, J.: Electric conductivity and catalytic activity of semiconducting oxide catalysts. Nature 179, 668 (1957).CrossRefGoogle Scholar
3Seiyama, T., Kato, A., and Fujiishi, K.: A new detector for gaseous components using semiconductive thin films. Anal. Chem. 34, 1502 (1962).Google Scholar
4Taguchi, N.: U.S. Patent No. 3 631 436 ( 1971).Google Scholar
5Goepel, W., Hesse, J., and Zemel, J.N.: Sensors: A Comprehensive Survey (VCH, New York, 1995).Google Scholar
6Moseley, P.T. and Tofield, B.C.: Solid State Gas Sensors (Hilger, Bristol/Philadelphia, 1987).Google Scholar
7Sberveglieri, G.: Gas Sensors: Principles, Operation, and Developments (Kluwer, Boston, 1992).Google Scholar
8Barsan, N., Schweizer-Berberich, M., and Goepel, W.: Fundamental and practical aspects in the design of nanoscaled SnO2 gas sensors: A status report. Fresenius’ J. Anal. Chem. 365, 287 (1999).CrossRefGoogle Scholar
9Simon, I., Barsan, N., Bauer, M., and Weimar, U.: Micromachined metal oxide gas sensors: Opportunities to improve sensor performance. Sens. Actuators, B: Chem. 73, 1 (2001).Google Scholar
10Barsan, N. and Weimar, U.: Understanding the fundamental principles of metal oxide based gas sensors; the example of CO sensing with SnO2 sensors in the presence of humidity. J. Phys. Condens. Matter 15, R813 (2003).Google Scholar
11Pijolat, C., Viricelle, J.P., Tournier, G., and Montmeat, P.: Application of membranes and filtering films for gas sensors improvements. Thin Solid Films 490, 7 (2005).Google Scholar
12Kwon, C.H., Yun, D.H., Hong, H.K., Kim, S-R., Lee, K., Lim, H.Y., and Yoon, K.H.: Multi-layered thick-film gas sensor array for selective sensing by catalytic filtering technology. Sens. Actuators, B: Chem. 65, 327 (2000).CrossRefGoogle Scholar
13Tournier, G. and Pijolat, C.: Selective filter for SnO2-based gas sensor: Application to hydrogen trace detection. Sens. Actuators B: Chem. 106, 553 (2005).Google Scholar
14Cabot, A., Arbiol, J., Cornet, A., Morante, J.R., Chen, F., and Liu, M.: Mesoporous catalytic filters for semiconductor gas sensors. Thin Solid Films 436, 64 (2003).CrossRefGoogle Scholar
15Hugon, O., Sauvan, M., Benech, P., Pijolat, C., and Lefebvre, F.: Gas separation with a zeolite filter, application to the selectivity enhancement of chemical sensors. Sens. Actuators, B: Chem. 67, 235 (2000).Google Scholar
16Schweizer-Berberich, M., Strathmann, S., Goepel, W., Shrama, R., and Peyre-Lavigne, A.: Filters for tin dioxide CO gas sensors to pass the UL2034 standard. Sens. Actuators, B: Chem. 66, 34 (2000).Google Scholar
17Fleischer, M., Kornely, S., Weh, T., Frank, J., and Meixner, H.: Selective gas detection with high-temperature operated metal oxides using catalytic filters. Sens. Actuators, B: Chem. 69, 205 (2000).CrossRefGoogle Scholar
18Hubalek, J., Malysz, K., Prasek, J., Vilanova, X., Ivanov, P., Llobet, E., Brezmes, J., Correig, X., and Sverák, Z.: Pt-loaded Al2O3 catalytic filters for screen-printed WO3 sensors highly selective to benzene. Sens. Actuators, B: Chem. 101, 277 (2004).Google Scholar
19Papadopoulos, C.A., Vlachos, D.S., and Avaritsiotis, J.N.: Comparative study of various metal-oxide-based gas-sensor architectures. Sens. Actuators, B: Chem. 32, 61 (1996).Google Scholar
20Tabata, S., Higaki, K., Ohnishi, H., Suzuki, T., Kunihara, K., and Kobayashi, M.: A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and a thin film heater. Part 2: CO sensing. Sens. Actuators, B: Chem. 109, 190 (2005).CrossRefGoogle Scholar
21Menil, F., Lucat, C., and Debeda, H.: The thick-film route to selective gas sensors. Sens. Actuators, B: Chem. 25, 415 (1995).CrossRefGoogle Scholar
22Mandayo, G.G., Castano, E., Gracia, F.J., Cirera, A., Cornet, A., and Morante, J.R.: Built-in active filter for an improved response to carbon monoxide combining thin- and thick-film technologies. Sens. Actuators, B: Chem. 87, 88 (2002).CrossRefGoogle Scholar
23Sberveglieri, G.: Classical and novel techniques for the preparation of tin dioxide thin-film gas sensors. Sens. Actuators, B: Chem. 6, 239 (1992).Google Scholar
24Wollenstein, J., Bottner, H., Jaegle, M., Becker, W.J., and Wagner, E.: Material properties and the influence of metallic catalysts at the surface of highly dense SnO2 films. Sens. Actuators, B: Chem. 70, 196 (2000).Google Scholar
25Nayral, C., Viala, E., Fau, P., Senocq, F., Jumas, J-C., Maisonnat, A., and Chaudret, B.: Synthesis of tin and tin oxide nanoparticles of low size dispersity for application in gas sensing. Chem.—Eur. J. 6, 4082 (2000).Google Scholar
26Baik, N.S., Sakai, G., Miura, N., and Yamazoe, N.: Hydrothermally treated sol solution of tin oxide for thin-film gas sensor. Sens. Actuators, B: Chem. 63, 74 (2000).Google Scholar
27Barsan, N. and Weimar, U.: Conduction model of metal oxide gas sensors. J. Electroceram. 7, 143 (2001).Google Scholar
28Sahm, T., Mädler, L., Gurlo, A., Barsan, N., Pratsinis, S.E., and Weimar, U.: Flame spray synthesis of tin dioxide nanoparticles for gas sensing. Sens. Actuators, B: Chem. 98, 148 (2004).Google Scholar
29Mädler, L., Roessler, A., Pratsinis, S.E., Sahm, T., Gurlo, A., Barsan, N., and Weimar, U.: Direct formation of highly porous gas-sensing films by in situ thermophoretic deposition of flame-made Pt/SnO2 nanoparticles. Sens. Actuators, B: Chem. 114, 283 (2006).Google Scholar
30Mädler, L., Lall, A.A., and Friedlander, S.K.: One-step aerosol synthesis of nanoparticle agglomerate films: Simulation of film porosity and thickness. Nanotechnology 17, 4783 (2006).Google Scholar
31Mädler, L. and Pratsinis, S.E.: Bismuth oxide nanoparticles by flame spray pyrolysis. J. Am. Ceram. Soc. 85, 1713 (2002).Google Scholar
32Mädler, L., Kammler, H.K., Mueller, R., and Pratsinis, S.E.: Controlled synthesis of nanostructured particles by flame spray pyrolysis. J. Aerosol Sci. 33, 369 (2002).Google Scholar
33Kappler, J.: Characterization of High-Performance SnO2 Gas Sensors for CO Detection by In Situ Techniques (Shaker Verlag, Aachen, 2001).Google Scholar
34Schulz, H., Mädler, L., Strobel, R., Jossen, R., Pratsinis, S.E., and Johannessen, T.: Independent control of metal cluster and ceramic particle characteristics during one-step synthesis of Pt/TiO2. J. Mater. Res. 20, 2568 (2005).Google Scholar
35Mueller, R., Jossen, R., Kammler, H.K., and Pratsinis, S.E.: Growth of zirconia particles made by flame spray pyrolysis. AIChE J. 50, 3085 (2004).Google Scholar
36Strobel, R., Krumeich, F., Stark, W.J., Pratsinis, S.E., and Baiker, A.: Flame spray synthesis of Pd/Al2O3 catalysts and their behavior in enantioselective hydrogenation. J. Catal. 222, 307 (2004).Google Scholar
37Gelin, P. and Primet, M.: Complete oxidation of methane at low temperature over noble metal based catalysts: A review. Appl. Catal. B Environmental 39(1), 1 (2002).Google Scholar
38Ciuparu, D., Lyubovsky, M.R., Altman, E., Pfefferle, L.D., and Datye, A.: Catalytic combustion of methane over palladium-based catalysts. Catal. Rev.—Sci. Eng. 44(4), 593 (2002).Google Scholar
39Demoulin, O., Navez, M., and Ruiz, P.: Investigation of the behaviour of a Pd/g-Al2O3 catalyst during methane combustion reaction using in situ DRIFT spectroscopy. Appl. Catal. Gen. 295(1), 59 (2005).Google Scholar
40Kohl, D.: Surface processes in the detection of reducing gases with tin dioxide-based devices. Sens. Actuators, B: Chem. 18(1), 71 (1989).Google Scholar
41Yamaguchi, Y., Nagasawa, Y., Shimomura, S., and Tabata, K.: Reaction model for methane oxidation on reduced SnO2 (110) surface. Int. J. Quantum Chem. 74, 423 (1999).3.0.CO;2-R>CrossRefGoogle Scholar