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Glow-discharge synthesis of silicon nitride precursor powders

Published online by Cambridge University Press:  31 January 2011

Pauline Ho ,
Richard J. Buss  and
Ronald E. Loehman
Pauline Ho
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185-5800
Richard J. Buss
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185-5800
Ronald E. Loehman
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185-5800
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Abstract

A radio-frequency glow discharge is used for the synthesis of submicron, amorphous, silicon nitride precursor powders from silanc and ammonia. Powders are produced with a range of Si/N ratios, including stoichiometric, Si-rich, and N-rich, and contain substantial amounts of hydrogen. The powders appear to be similar to silicon diimide and are easily converted to oxide by water vapor. The powders lose weight and crystallize to a mixture of α and β–Si3N4 after prolonged heating at 1600 °C. Studies of spectrally and spatially resolved optical emission from the plasma are reported.

Type
Articles
Information
Journal of Materials Research , Volume 4 , Issue 4 , August 1989 , pp. 873 - 881
Copyright
Copyright © Materials Research Society 1989

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