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Growth, microstructure, charge transport, and transparency of random polycrystalline and heteroepitaxial metalorganic chemical vapor deposition-derived gallium–indium–oxide thin films

Published online by Cambridge University Press:  31 January 2011

Anchuan Wang ,
Nikki L. Edleman ,
Jason R. Babcock ,
Tobin J. Marks ,
Melissa A. Lane ,
Paul R. Brazis  and
Carl R. Kannewurf
Anchuan Wang
Affiliation:
Department of Chemistry and the Materials Research Center, Northwestern University, Evanston, Illinois 60208
Nikki L. Edleman
Affiliation:
Department of Chemistry and the Materials Research Center, Northwestern University, Evanston, Illinois 60208
Jason R. Babcock
Affiliation:
Department of Chemistry and the Materials Research Center, Northwestern University, Evanston, Illinois 60208
Tobin J. Marks*
Affiliation:
Department of Chemistry and the Materials Research Center, Northwestern University, Evanston, Illinois 60208
Melissa A. Lane
Affiliation:
Department of Electrical and Computer Engineering and the Materials Research Center, Northwestern University, Evanston, Illinois 60208
Paul R. Brazis
Affiliation:
Department of Electrical and Computer Engineering and the Materials Research Center, Northwestern University, Evanston, Illinois 60208
Carl R. Kannewurf
Affiliation:
Department of Electrical and Computer Engineering and the Materials Research Center, Northwestern University, Evanston, Illinois 60208
*
a)Address all correspondence to this author.t-marks@northwestern.edu
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Abstract

Gallium–indium–oxide films (GaxIn2⊟xO3), where x = 0.0–1.1, were grown by low-pressure metalorganic chemical vapor deposition using the volatile metalorganic precursors In(dpm)3 and Ga(dpm)3 (dpm = 2,2,6,6-tetramethyl-3,5-heptanedionato). The films were smooth (root mean square roughness = 50–65 Å) with a homogeneously Ga-substituted, cubic In2O3 microstructure, randomly oriented on quartz or heteroepitaxial on (100) yttria-stabilized zirconia single-crystal substrates. The highest conductivity of the as-grown films was found at x = 0.12, with σ = 700 S/cm [n-type; carrier density = 8.1 × 1019 cm⊟3; mobility = 55.2 cm2/(V s); dσ/dT<0]. The optical transmission window of such films is considerably broader than that of Sn-doped In2O3, and the absolute transparency rival or exceeds that of the most transparent conductive oxides known. Reductive annealing, carried out at 400–425 C° in a flowing gas mixture of H2 (4%) and N2, resulted in increased conductivity (σ 1400 S/cm; n-type), carrier density (1.4 × 1020 cm⊟3), and mobility as high as 64.6 cm2/(V s), with little loss in optical transparency. No significant difference in carrier mobility or conductivity is observed between randomly oriented and heteroepitaxial films, arguing in combination with other data that carrier scattering effects at high-angle grain/domain boundaries play a minor role in the conductivity mechanism.

Type
Articles
Information
Journal of Materials Research , Volume 17 , Issue 12 , December 2002 , pp. 3155 - 3162
Copyright
Copyright © Materials Research Society 2002

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