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A mechanism of CVD diamond film growth deduced from the sequential deposition from sputtered carbon and atomic hydrogen

Published online by Cambridge University Press:  03 March 2011

Darin S. Olson ,
Michael A. Kelly ,
Sanjiv Kapoor  and
Stig B. Hagstrom
Darin S. Olson
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305-2205
Michael A. Kelly
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305-2205
Sanjiv Kapoor
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305-2205
Stig B. Hagstrom
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305-2205
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Abstract

We describe a growth mechanism of CVD diamond films consisting of a series of surface reactions. It is derived from experimental observations of a sequential deposition process in which incident carbon flux and atomic hydrogen flux were independently varied. In this sequential process, film growth rate increased with atomic hydrogen exposure, and a saturation in the utilization of carbon was observed. These features are consistent with a surface growth process consisting of the following steps: (i) the carburization of the diamond surface, (ii) the deposition of highly disordered carbon on top of this surface, (iii) the etching of disordered carbon by atomic hydrogen, (iv) the conversion of the carburized diamond surface to diamond at growth sites by atomic hydrogen, and (v) the carburization of newly grown diamond surface. The nature of the growth sites on the diamond surface has not been determined experimentally, and the existence of the carburized surface layer has not been demonstrated experimentally. The surface growth mechanism is the only one consistent with the growth observed in conventional diamond reactors and the sequential reactor, while precluding the necessity of gas phase precursors.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 6 , June 1994 , pp. 1546 - 1551
Copyright
Copyright © Materials Research Society 1994

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References

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