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Microstructural evolution during pyrolysis of triol-based sol-gel single-layer Pb(Zr0.53Ti0.47)O3 thin films

Published online by Cambridge University Press:  31 January 2011

Zhaoxia Zhou
Affiliation:
Department of Engineering Materials, University of Sheffield, Sheffield S1 3JD, U.K.
Ian M. Reaney*
Affiliation:
Department of Engineering Materials, University of Sheffield, Sheffield S1 3JD, U.K.
David Hind
Affiliation:
Department of Materials, University of Leeds, Leeds LS2 9JT, U.K.
Steven J. Milne
Affiliation:
Department of Materials, University of Leeds, Leeds LS2 9JT, U.K.
Andy P. Brown
Affiliation:
Department of Materials, University of Leeds, Leeds LS2 9JT, U.K.
Rik Brydson
Affiliation:
Department of Materials, University of Leeds, Leeds LS2 9JT, U.K.
*
a)Address all correspondence to this author.i.m.reaney@sheffield.ac.uk
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Abstract

Advanced analytical transmission electron microscopy has been used to investigate microstructural evolution during pyrolysis in triol-based sol-gel thin films. At pyrolysis temperatures up to 300 °C, the films remained amorphous; however, nanometer-sized precipitates were observed in films heat-treated up to 400 °C for 10 min. Analytical transmission electron microscopy indicated that the precipitates were Pb-rich, as well as deficient in O, Ti, and Zr. Films pyrolyzed up to 500 °C for 10 min were composed of a nanocrystalline pyrochlore phase; however, pores could be observed, situated in the same position as the nanometer-sized precipitates at 400 °C. Face-centered cubic Pb-rich crystallites were also present on the surface of pyrolyzed films but absent in the fully crystallized films annealed at 650 °C. A tentative mechanism is proposed to explain these observations.

Type
Articles
Copyright
Copyright © Materials Research Society 2002

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References

1.Kingon, A.I. and Streiffer, S.K., Curr. Opin. Solid State Mater. Sci. 4, 39 (1999).CrossRefGoogle Scholar
2.Cross, L.E., in Ferroelectric Ceramics Tutorial Reviews, Theory, processing, and applications edited by Setter, N. and Colla, E.L. (Birkaäuser, Basel, Switzerland, 1993), pp. 186.Google Scholar
3.Roy, R., Science 238, 1664 (1987).CrossRefGoogle Scholar
4.Impey, S.A., Huang, Z., Patel, A., Beanland, R., Shorrocks, N.M., Watton, R., and Whatmore, R., J. Appl. Phy. 83, 2202 (1998).CrossRefGoogle Scholar
5.Lakeman, C.D.E. and Payne, D.A., J. Am. Ceram. Soc. 75, 3091 (1992).CrossRefGoogle Scholar
6.Merkle, R. and Bertagnolli, H., J. Mater. Sci. 33, 4341 (1998).CrossRefGoogle Scholar
7.Sriprang, N., Kaewchinda, D., Kennedy, J.D., and Milne, S.J., J. Am. Ceram. Soc. 83, 1914 (2000).CrossRefGoogle Scholar
8.Polli, A.D. and Lange, F.E., J. Am. Ceram. Soc. 78, 3401 (1995).CrossRefGoogle Scholar
9.Li, S., Condrate, R.A., and Spriggs, R.M., J. Can. Ceram. Soc. 57, 61 (1988).Google Scholar
10.Arscott, S., Miles, R.E., and Milne, S.J., Ferroelectrics, 228, 61 (1999).CrossRefGoogle Scholar
11.Zhou, Z., Reaney, I.M., Hind, D., Khemprist, J., and Milne, S.J., J. Am. Ceram. Soc (submitted for publication).Google Scholar
12.Reaney, I.M., Microelectron. Eng. 29, 277 (1995).CrossRefGoogle Scholar
13.Reaney, I.M., Brooks, K.G., Klissturska, R., Pawlaczyk, C., and Setter, N., J. Am. Ceram. Soc. 77, 1209 (1994).CrossRefGoogle Scholar
14.Huang, Z., Zhang, Q., and Whatmore, R.W., J. Mater. Sci. Lett. 17, 1157 (1998).CrossRefGoogle Scholar
15.Huang, Z., Zhang, Q., and Whatmore, R.W., J. Appl. Phy. 86, 1662 (1999).CrossRefGoogle Scholar
16.Brooks, K.G., Reaney, I.M., Klissurska, R., Huang, Y., Bursill, L., and Setter, N., J. Mater. Res. 9, 2540 (1995).CrossRefGoogle Scholar
17.Chen, S-Y. and Chen, I-W., J. Am. Ceram. Soc. 81, 97 (1998).CrossRefGoogle Scholar
18.Brydson, R., Electron Energy Loss Spectroscopy (Bios, Oxford, United Kingdom, 2001).Google Scholar
19.Egerton, R.F., Electron Energy-Loss Spectroscopy in the Electron Microscope 2nd ed. (Plenum Press, New York, 1996).CrossRefGoogle Scholar
20.Honda, T., Tonita, T., Kaneyama, T., and Ishida, Y., Ultramicros-copy 54, 132 (1994).CrossRefGoogle Scholar
21.Hoffman, M., Goral, J.P., Aljassim, M.M., and Echer, C., J. Vac. Sci. Technol., A 10, 1518 (1992).Google Scholar
22.Wu, A., Vilarinho, P.H., Salvado, I.M. Miranda, Baptista, J.L., Jesus, C.M. De, and Silva, M.F. Da, J. Eur. Ceram. Soc. 19, 1403 (1999).CrossRefGoogle Scholar
23.Kaewchinda, D., Chairaungsri, T., Naksata, M., Milne, S.J., and Brydson, R., J. Eur. Ceram. Soc. 20, 1277 (2000).CrossRefGoogle Scholar