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Structural and optical properties of laser-synthesized copper oxide films

Published online by Cambridge University Press:  31 January 2011

M. Wautelet ,
A. Roos ,
R. Lazzaroni ,
F. Hanus  and
G. Lambin
M. Wautelet
Affiliation:
Solid State Physics, Department of Materials, University of Mons-Hainaut, B-7000 Mons, Belgium
A. Roos
Affiliation:
Department of Technology, Uppsala University, Box 534, S-75121, Uppsala, Sweden
R. Lazzaroni
Affiliation:
Materials Chemistry, Department of Materials, University of Mons-Hainaut, B-7000 Mons, Belgium
F. Hanus
Affiliation:
Solid State Physics, Department of Materials, University of Mons-Hainaut, B-7000 Mons, Belgium
G. Lambin
Affiliation:
Materials Chemistry, Department of Materials, University of Mons-Hainaut, B-7000 Mons, Belgium
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Abstract

Thin copper films are deposited onto glass and irradiated, in air, by means of a scanned Ar+ laser beam. The kinetics of oxidation are measured by an interferometric method. The laser-synthesized oxide films are characterized by optical microscopy, scanning tunneling microscopy, and optical spectroscopy. It is shown that the oxidation kinetics, as well as the structural and optical properties of the oxide, depend on the laser beam power and on the initial thickness of the copper film. It is argued that these facts are related to the thermal history of the samples under laser irradiation.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 2 , February 1993 , pp. 327 - 333
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1Bauerle, D.Chemical Processing with Lasers (Springer, Berlin, 1985).Google Scholar
2Boyd, I. W.Laser Processing of Thin Films and Microstructures (Springer, Berlin, 1987).CrossRefGoogle Scholar
3Wautelet, M.Appl. Phys. A 50, 131 (1990).Google Scholar
4Bunkin, F.V.Kirichenko, N.A. and Luk'Yanchuk, B.S., Sov. Phys. Usp. 25, 662 (1982).CrossRefGoogle Scholar
5Andrew, R.Appl. Phys. B 41, 205 (1986).CrossRefGoogle Scholar
6Wautelet, M. and Andrew, R.Philos. Mag. B 55, 261 (1987).CrossRefGoogle Scholar
7Baufay, L.Houle, F. A. and Wilson, R.J. Appl. Phys. 61, 4640 (1987).CrossRefGoogle Scholar
8Wautelet, M.J. Appl. Phys. 70, 3852 (1991).CrossRefGoogle Scholar
9Wautelet, M. and Hanus, F.Appl. Phys. Lett. 58, 1355 (1991).CrossRefGoogle Scholar
10Wautelet, M.Roos, A. and Hanus, F.J. Phys. D 23, 991 (1990).CrossRefGoogle Scholar
11Handbook of Optical Constants of Solids II, edited by Palik, E. D. (Academic Press, New York, 1991).Google Scholar
12Karlsson, B.Ribbing, C. G.Roos, A.Valkonen, E. and Karls-son, T., Phys. Scr. 25, 826 (1982).Google Scholar
13Roos, A.Bergkvist, M. and Ribbing, C.G.Appl. Opt. 28, 1360 (1989).Google Scholar
14Roos, A.Bergkvist, M. and Ribbing, C. G.Thin Solid Films 125, 221 (1985).CrossRefGoogle Scholar
15Bennett, J. M. and Mattsson, L.Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, DC, 1989).Google Scholar
16Ready, J. F.Effects of High-Power Laser Radiation (Academic Press, New York, 1971).Google Scholar
17Evans, A.G.Drory, M.D. and Hu, M.S.J. Mater. Res. 3, 1043 (1988).CrossRefGoogle Scholar
18Bergkvist, M.Roos, A.Ribbing, C.G.Bennett, J.M. and Mattsson, L.Appl. Opt. 28, 3902 (1989).CrossRefGoogle Scholar
19d'Heurle, F.M., J. Vac. Sci. Technol. A 7, 1467 (1989).Google Scholar