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Structure of a-C:N:H prepared from ammonia

Published online by Cambridge University Press:  01 December 2005

J.K. Walters
Affiliation:
School of Physical Sciences, University of Kent, Canterbury CT2 7NR, United Kingdom
D.M. Pickup
Affiliation:
School of Physical Sciences, University of Kent, Canterbury CT2 7NR, United Kingdom
R.J. Newport*
Affiliation:
School of Physical Sciences, University of Kent, Canterbury CT2 7NR, United Kingdom
*
a)Address all correspondence to this author. e-mail: r.j.newport@kent.ac.uk
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Abstract

A range of nitrogen-doped amorphous hydrogenated carbon samples (a-C:Nx:H, where x = 3 at.% and x = 7 at.%) have been studied using neutron diffraction, inelastic neutron scattering (INS) and Fourier transform infra-red (FTIR) spectroscopy to obtain detailed information about their atomic-scale structure, particularly the bonding environment of the hydrogen. The results show that the overall atomic scale network structure of the two samples is very similar; however, the hydrogen-bonding sites alter subtly as the nitrogen content of the samples is increased.

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Articles
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Copyright © Materials Research Society 2005

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References

REFERENCES

1.Angus, J.C., Koidl, P. and Domitz, S.: Carbon thin films, in Plasma Deposited Thin Films, edited by Mort, J. and Jansen, F. (Chemical Rubber Company Press, Boca Raton, FL, 1989), p. 89.Google Scholar
2.Robertson, J.: Amorphous carbon. Adv. Phys. 35, 317 (1986).CrossRefGoogle Scholar
3.Lettington, A.H.: Applications of diamond-like carbon thin films. Carbon 36, 555 (1998).CrossRefGoogle Scholar
4.Kimock, F.M. and Knapp, B.J.: Commercial applications of ion-beam deposited diamond-like carbon (DLC) coatings. Surf. Coat. Technol. 56, 273 (1993).CrossRefGoogle Scholar
5.Debajyoti, D., Chen, K.H., Chattopadhyay, S. and Chen, L.C.: Spectroscopic studies of nitrogenated amorphous carbon films prepared by ion beam sputtering. J. Appl. Phys. 91, 4944 (2002).Google Scholar
6.Rodil, S.E., Olivares, R. and Arzate, H.: In vitro cytotoxicity of amorphous carbon films. Biomed. Mater. Eng. 15, 101 (2005).Google ScholarPubMed
7.Jones, D.I. and Stewart, A.D.: Properties of hydrogentated amorphous carbon films and the effects of doping. Philos. Mag. B 46, 423 (1982).CrossRefGoogle Scholar
8.Davis, C.A., Yin, Y., McKenzie, D.R., Hall, L.E., Kravtchinskaia, E., Keast, V., Amaratunga, G.J. and Veerasamy, V.S.: The structure of boron-, phosphorus-, and nitrogen-doped tetrahedral amorphous carbon deposited by cathodic arc. J. Non-Cryst. Solids 170, 46 (1994).CrossRefGoogle Scholar
9.Amir, O. and Kalish, R.: Properties of nitrogen-doped amorphous hydrogentated carbon films. J. Appl. Phys. 70, 4958 (1991).CrossRefGoogle Scholar
10.Mansour, A. and Ugolini, D.: Photoelectron spectroscopy study of amorphous a-CNx:H. Phys. Rev. B 47, 10201 (1993).CrossRefGoogle ScholarPubMed
11.Mendoza, D., Anguilar-Hernandez, J. and Contreras-Puente, G.: Graphite-like bonding induced in hydrogenated amorphous carbon films with high nitrogen content. Solid State Commun. 84, 1025 (1992).CrossRefGoogle Scholar
12.Veerasamy, V.S., Amaratunga, G.A.J., Milne, W.I., Robertson, J. and Fallon, P.J.: Influence of carbon ion energy on properties of highly tetrahedral diamond-like carbon. J. Non-Cryst. Solids 164–166, 1111 (1993).CrossRefGoogle Scholar
13.Davis, C.A., McKenzie, D.R., Yin, Y., Kravtchinskaia, E., Amaratunga, G.A.J. and Veerasamy, V.S.: Substitutional nitrogen doping of tetrahedral amorphous carbon. Philos. Mag. B 69, 1133 (1994).CrossRefGoogle Scholar
14.Liu, A.Y. and Cohen, M.L.: Structural properties and electronic structure of low-compressibility materials: β–Si3N4 and hypothetical β–C3N4. Phys. Rev. B 41, 10727 (1990).CrossRefGoogle ScholarPubMed
15.Han, H. and Feldman, B.J.: Structural and optical properties of amorphous carbon nitride. Solid State Commun. 65, 921 (1988).CrossRefGoogle Scholar
16.Franceschini, D.F., Achete, C.A., Freire, F.L., Beyer, W. and Mariotto, G.: Structural modifications in a-C:H films doped and implanted with nitrogen. Diamond Relat. Mater. 3, 88 (1993).CrossRefGoogle Scholar
17.Kaufman, J.H., Metin, S. and Saperstein, D.D.: Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-active G and D bands. Phys. Rev. B 39, 13053 (1989).CrossRefGoogle ScholarPubMed
18.Viehland, J., Lin, S., Feldman, B.J., Kilgore, K. and Jones, M.I.: Search for the nitrogen dangling bond in amorphous hydrogentated carbon nitride. Solid State Commun. 80, 597 (1991).CrossRefGoogle Scholar
19.Li, D., Lopez, S., Chung, Y.W., Wang, M.S. and Sproul, W.D.: Ionized magnetron sputter deposition of amorphous carbon nitride thin films. J. Vac. Sci. Technol. A 13, 1063 (1995).CrossRefGoogle Scholar
20.Barradas, N.P., Khan, R.U.A., Anguita, J.V., Silva, S.R.P., Kreissig, U., Grötzschel, R. and Möller, W.: Growth and characterisation of amorphous carbon films doped with nitrogen. Nucl. Instrum. Meth. B 161, 969 (2000).CrossRefGoogle Scholar
21.Rodil, S.E., Ferrari, A.C., Robertson, J. and Muhl, S.: Infrared spectra of carbon nitride films. Thin Solid Films 420, 122 (2002).CrossRefGoogle Scholar
22.Bouchet-Fabre, B., Godet, C., Lacerda, M., Charvet, S., Zellama, K. and Ballutaud, D.: Stoichiometry and infrared absorption of amorphous a-C1−xNx:H carbon nitride films. J. Appl. Phys. 95, 3427 (2004).CrossRefGoogle Scholar
23.Rodil, S.E. and Muhl, S.: Bonding in amorphous carbon nitride. Diamond Relat. Mater. 13, 1521 (2004).CrossRefGoogle Scholar
24.Bouchet-Fabre, B., Zellama, K., Godet, C., Ballutaud, D. and Minea, T.: Comparative study of the structure of a-CNx and a-CNx:H films using NEXAFS, XPS and FT-IR analysis. Thin Solid Films 482, 156 (2005).CrossRefGoogle Scholar
25.Lazar, G., Zellama, K., Vascan, I., Stamate, M., Lazar, I. and Rusu, I.: Infrared absorption properties of amorphous carbon films. J Optoelectron. Adv. Mater. 7, 647 (2005).Google Scholar
26.Fanchini, G., Mandracci, P., Tagliaferro, A., Rodil, S.E., Vomiero, A. and Mea, G.D.: Growth and characterisation of polymeric amorphous carbon and carbon nitride films from propane. Diamond Relat. Mater. 14, 928 (2005).CrossRefGoogle Scholar
27.Rodil, S.E.: Infrared spectra of amorphous carbon-based materials. Diamond Relat. Mater. 14, 1262 (2005).CrossRefGoogle Scholar
28.Ripalda, J.M., Roman, E., Diaz, N., Galan, L., Montero, I., Comelli, G., Baraldi, A., Lizzit, S., Goldoni, A. and Paolucci, G.: Correlation of x-ray absorption and x-ray photoemission spectroscopies in amorphous carbon nitride. Phys. Rev. B 60, R3705 (1999).CrossRefGoogle Scholar
29.Ferlauto, A.S., Champi, A., Figueroa, C.A., Ribeiro, C.T.M., Marques, F.C. and Alvares, F.: Structural properties of amorphous carbon nitride films prepared by ion-beam-assisted deposition. J. Non-Cryst. Solids 338, 486 (2004).CrossRefGoogle Scholar
30.Marino, E., Bouchet-Fabre, B., Porterat, D. and Reynaud, C.: Spectroscopic study of carbon nitride nanoparticles synthesised by laser pyrolysis. Diamond Relat. Mater. 14, 1120 (2005).CrossRefGoogle Scholar
31.Walters, J.K., Honeybone, P.J.R., Huxley, D.W., Newport, R.J. and Howells, W.S.: The structural properties of amorphous hydrogenated carbon: I. A high resolution neutron diffraction study. Phys. Rev. B 50, 831 (1994).CrossRefGoogle Scholar
32.Walters, J.K., Newport, R.J., Howells, W.S. and Parker, S.F.: A spectroscopic study of the structure of amorphous hydrogenated carbon. J. Phys.: Condens. Matter 7, 10059 (1995).Google Scholar
33.Walters, J.K., Newport, R.J., Howells, W.S. and Bushnell-Wye, G.: Neutron and x-ray diffraction studies of a-C:N:H. J. Phys.: Condens. Matter 8, 4739 (1996).Google Scholar
34.Walters, J.K., Kühn, M., Spaeth, C., Dooryhee, E. and Newport, R.J.: X-ray diffraction studies of the effects of N incorporation in amorphous CNx materials. J. Appl. Phys. 83, 3529 (1998).CrossRefGoogle Scholar
35.Lazar, G. and Lazar, I.: IR characterisation of a-C:N:H films sputtered in Ar/CH4/N2 plasma. J. Non-Cryst. Solids 331, 70 (2003).CrossRefGoogle Scholar
36.Qui, Y. and Gao, L.: P-type carbon nitride synthesized by a gas-solid reaction. J Am. Ceram. Soc. 87, 1598 (2004).Google Scholar
37.Johnson, P.A.V., Wright, A.C. and Sinclair, R.N.: Neutron-scattering from vitreous silica. II. Twin-axis diffraction experiments. J. Non-Cryst. Solids 58, 109 (1983).CrossRefGoogle Scholar
38.Gaskell, P.H., Saeed, A., Chieux, P. and McKenzie, D.R.: The structure of highly tetrahedral amorphous diamond-like carbon I. Neutron-scattering studies. Philos. Mag. B 66, 155 (1992).CrossRefGoogle Scholar
39.Dischler, B., Bubenzer, A. and Koidl, P.: Bonding in hydrogenated hard carbon studied by optical spectroscopy. Solid State Comm. 48, 105 (1983).CrossRefGoogle Scholar
40.Angus, J.C., Stultz, J.E., Shiller, P.J., MacDonald, J.R., Mirtich, M.J. and Domitz, S.: Composition and properties of the so-called diamond-like amorphous-carbon films. Thin Solid Films 118, 311 (1984).CrossRefGoogle Scholar
41.Vandentrop, G.J., Kawasaki, M., Kobayashi, K. and Somorjai, G.A.: The effect of ion-energy flux on the properties of hydrogenated amorphous-carbon films. J. Vac. Sci. Technol. A 9, 1157 (1991).CrossRefGoogle Scholar
42.Walters, J.K., Fox, D.M., Burke, T.M., Weedon, O.D., Newport, R.J. and Howells, W.S.: The effect of temperature on the structure of amorphous hydrogenated carbon. J. Chem. Phys. 101, 4288 (1994).CrossRefGoogle Scholar
43.Ferrari, A.C., Rodil, S.E. and Robertson, J.: Interpretation of infrared and Raman spectra of amorphous carbon nitrides. Phys. Rev. B 67, 155306 (2003).CrossRefGoogle Scholar
44.Mauri, F. and Corso, A.D.: Vibrational properties of tetrahedral amorphous carbon from first principles. Appl. Phys. Lett. 75, 644 (1999).CrossRefGoogle Scholar
45.Franks, J.: Atom beam source. Vacuum 34, 259 (1984).CrossRefGoogle Scholar
46.Franks, J.: Preparation and properties of diamondlike-carbon films. J. Vac. Sci. Technol. A 7, 2307 (1989).CrossRefGoogle Scholar
47. User Guide to Experimental Facilities at ISIS, at www.isis.rl.ac.uk (Rutherford Appleton Laboratory, Didcot, U.K., 1992).Google Scholar
48.Newport, R.J.: The structure of liquids and amorphous solids, in Neutron Scattering at a Pulsed Source edited by Newport, R.J., Rainford, B.D. and Cywinski, R. (Hilger, Bristol, U.K., 1988), p. 233.Google Scholar
49.Squires, G.L.: Introduction to the theory of thermal neutron scattering (Cambridge University Press, Cambridge, 1978).Google Scholar
50.Gunn, J.M.F.: Theory of neutron scattering, in Neutron Scattering at a Pulsed Source, edited by Newport, R.J., Rainford, B.D., and Cywinski, R. (Hilger, Bristol, U.K., 1988), p. 24.Google Scholar
51.Howells, W.S., Soper, A.K. and Hannon, A.C. ATLAS—analysis of time-of-flight diffraction data from liquid and amorphous samples, Rutherford Appleton Laboratory Report RAL-89-046 (Rutherford Appleton Laboratory, Didcot, U.K., 1989).Google Scholar
52.Powles, J.G.: Slow neutron scattering by molecules. Mol. Phys. 36, 1181 (1978).CrossRefGoogle Scholar
53.Soper, A.K. and Bowron, D.T.: SANDALS—Small angle neutron diffractometer for amorphous and liquid samples, at www.isis.rl.ac.uk/Disordered/SANDALS.htm, and references therein (2000).Google Scholar
54.Parker, S.F., Carlile, C.J., Pike, T., Tomkinson, J., Newport, R.J., Andreani, C., Ricci, F.P., Sacchetti, F. and Zoppi, F.: TOSCA: A world class inelastic neutron spectrometer. Physica B 241–243, 154 (1998).Google Scholar
55.Lovesey, S.W.: Theory of Neutron Scattering from Condensed Matter, Vol. 1 (Clarendon Press, Oxford, U.K., 1984), pp. 257264.Google Scholar
56.Tomkinson, J.: Inelastic incoherent neutron scattering spectroscopy of hydrogen vibrations in metals and molecules, in Neutron Scattering at a Pulsed Source edited by Newport, R.J., Rainford, B.D. and Cywinski, R. (Hilger, Bristol, U.K., 1988), p. 324.Google Scholar
57.Lukins, P.B., McKenzie, D.R., Vassallo, A.M. and Hanna, J.V.: C-13 NMR and FTIR study of thermal annealing of amorphous hydrogenated carbon. Carbon 31, 569 (1993).CrossRefGoogle Scholar
58.Dischler, B., Bubenzer, A. and Koidl, P.: Bonding in hydrogenated hard carbon studies by optical spectroscopy. Solid State Commun. 48, 105 (1983).CrossRefGoogle Scholar
59.Gonzalez-Hernandez, J., Chao, B.S. and Pawlik, D.A.: Characterization of as-prepared and annealed hydrogenated carbon-films. J. Vac. Sci. Technol. 7, 2332 (1989).CrossRefGoogle Scholar
60.Novikov, N.V., Voronkin, M.A., Smekhnov, A.A., Zaika, N.I. and Zakharchuk, A.P.: Deposition by reactive ion-plasma sputtering and characterisation of C–N thin films. Diamond Relat. Mater. 4, 390 (1995).CrossRefGoogle Scholar