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An Operating Method with Lateral Scan for Reducing the Error in Topography Caused by the Tip-Sample Angle in Atomic Force Microscopy

Published online by Cambridge University Press:  24 August 2010

Fa-Quan Zhou ,
Xue-Zeng Zhao ,
Fei Wang  and
Yue-Yu Wang
Fa-Quan Zhou*
Affiliation:
School of Mechatronic Engineering, Harbin Institute of Technology, Harbin, Heilongjiang Province 150001, China Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin, Heilongjiang Province 150001, China
Xue-Zeng Zhao
Affiliation:
School of Mechatronic Engineering, Harbin Institute of Technology, Harbin, Heilongjiang Province 150001, China Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin, Heilongjiang Province 150001, China
Fei Wang
Affiliation:
School of Mechatronic Engineering, Harbin Institute of Technology, Harbin, Heilongjiang Province 150001, China Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin, Heilongjiang Province 150001, China
Yue-Yu Wang
Affiliation:
School of Mechatronic Engineering, Harbin Institute of Technology, Harbin, Heilongjiang Province 150001, China
*
Corresponding author. E-mail: akoo_ren@163.com
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Abstract

The atomic force microscopes (AFM) images are obtained by keeping the bending of the cantilever unchanged in contact mode. However, it is found that changes in the tip-sample angle during parallel scan result in error in the topographic image. It is also discovered that measurement results obtained in the blind scan region contained large errors. In contrast, regions opposite the blind scan region gave more reliable result. To eliminate this topographic error caused by change in the tip-sample angle, a new operating method with lateral scan is utilized in AFM. Comparative experiments have been performed, and the results show that the error could be eliminated or decreased by using the operating method.

Keywords

atomic force microscopeoperating methodtip-sample angleerrorparallel scanblind scan region
Type
Atomic Force and Atom Probe Applications
Information
Microscopy and Microanalysis , Volume 16 , Issue 5 , October 2010 , pp. 630 - 635
Copyright
Copyright © Microscopy Society of America 2010

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References

REFERENCES

Binnig, G., Quate, C.F. & Gerber, C. (1986). Atomic force microscopy. Phys Rev Lett 56, 930.CrossRefGoogle Scholar
Butt, H.J., Cappella, B. & Kappl, M. (2005). Force measurements with the atomic force microscope: Technique, interpretation and applications. Surf Sci Rep 59, 149–152.CrossRefGoogle Scholar
Fu, J., Tsai, V.W., Koning, R. & Dixson, R.G. (1999). The study of silicon stepped surfaces as atomic force microscope calibration standards with a calibrated AFM at NIST. J Elect Nanotechnol 10, 428–434.CrossRefGoogle Scholar
Heinz, W.F. & Hoh, J.H. (1999). Spatially resolved force spectroscopy of biological surfaces using the atomic force microscope. Tibtech 17, 143–150.CrossRefGoogle ScholarPubMed
Lee, S., Howell, S. & Raman, A. (2003). Nonlinear dynamic perspectives on dynamic force microscopy. Ultramicroscopy 97, 185–198.CrossRefGoogle ScholarPubMed
Lin, Q. & Meyer, E. (2005). Measurement of the long- and short-range hydrophobic attraction between surfactant-coated surfaces. Langmuir 21, 251–255.CrossRefGoogle Scholar
Mahmood, I.A. & Moheimani, S.O. (2009). Making a commercial AFM more accurate and faster using positive position feedback control. Rev Sci Instrum 80, 063705.CrossRefGoogle ScholarPubMed
Quintanilla, M.A.S. & Goddard, D.T. (2008). A calibration method for lateral forces for use with colloidal probe force microscopy cantilevers. Rev Sci Instrum 79, 023701.CrossRefGoogle ScholarPubMed
Reitsma, M.G. (2007). Lateral force microscope calibration using a modified atomic force microscope cantilever. Rev Sci Instrum 78, 106102.CrossRefGoogle ScholarPubMed
Schiffmann, K.I., Fryda, M. & Goerigk, G. (1996). Statistical methods for the correction of tip convolution effects in STM imaging of nanometer size particles in metal-C:H films. Ultramicroscopy 66, 183–192.CrossRefGoogle Scholar
Tao, Z. & Bhushan, B. (2006). Surface modification of AFM Si3N4 probes for adhesion/friction reduction and imaging improvement. J Tribol 128, 865–875.CrossRefGoogle Scholar
Tegenfeldt, J. & Montelius, L. (1995). Image widening not only a question of tip sample convolution. Appl Phys Lett 66, 1068–1070.CrossRefGoogle Scholar
Wang, F. & Zhao, X.Z. (2007). Effect of contact stiffness on wedge calibration of lateral force in atomic force microscopy. Rev Sci Instrum 78, 043701.CrossRefGoogle ScholarPubMed
Wang, Y.L., Zhao, X.Z. & Zhou, F.Q. (2007). Improved parallel scan method for nanofriction force measurement with atomic force microscopy. Rev Sci Instrum 78, 036107.CrossRefGoogle ScholarPubMed
Werner, A.L.S., Hofer, A. & Foster, S. (2003). Theories of scanning probe microscopes at the atomic scale. Rev Mod Phys 75, 1287–1331.Google Scholar