Hostname: page-component-cd9895bd7-hc48f Total loading time: 0 Render date: 2024-12-27T23:33:07.898Z Has data issue: false hasContentIssue false
  • English
  • Français

Application of X-ray Optics to Energy-Dispersive Spectroscopy

Published online by Cambridge University Press:  28 July 2005

Jon J. McCarthy  and
David J. McMillan
Jon J. McCarthy
Affiliation:
Research and Development Department, NORAN Instruments Inc., 2551 West Beltline Highway, Middleton, WI 53562
David J. McMillan
Affiliation:
Research and Development Department, NORAN Instruments Inc., 2551 West Beltline Highway, Middleton, WI 53562
Get access

Abstract

X-ray optics have been used in X-ray analytical instruments for several years. Applications of X-ray optics have been reported in X-ray diffraction, X-ray fluorescence, and wavelength dispersive spectroscopy. X-ray optics have been used to increase the X-ray flux incident on the sample or to direct and focus emitted X-rays from a sample. We report here the use of a grazing incidence optic (GIO) as a flux-enhancing collimator for use with an energy-dispersive (ED) detector used to perform electron beam microanalysis. We found that the GIO in combination with an ED spectrometer (EDS) provides substantial intensity gain for X-ray lines with energy below 1 keV. The GIO is also found to provide a modest focus effect, and introduces minimal spectral artifacts.

Keywords

microanalysisEDSSEMgrazing incidence opticX-ray intensity gain
Type
1998 TOPICAL SYMPOSIUM OF THE MICROBEAM ANALYSIS SOCIETY
Information
Microscopy and Microanalysis , Volume 4 , Issue 6 , December 1998 , pp. 632 - 641
Copyright
© 2005 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)