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Modern Focused-Ion-Beam-Based Site-Specific Specimen Preparation for Atom Probe Tomography

Published online by Cambridge University Press:  06 February 2017

Ty J. Prosa  and
David J. Larson
Ty J. Prosa*
Affiliation:
Cameca Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA
David J. Larson
Affiliation:
Cameca Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA
*
*Corresponding author. ty.prosa@ametek.com
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Abstract

Approximately 30 years after the first use of focused ion beam (FIB) instruments to prepare atom probe tomography specimens, this technique has grown to be used by hundreds of researchers around the world. This past decade has seen tremendous advances in atom probe applications, enabled by the continued development of FIB-based specimen preparation methodologies. In this work, we provide a short review of the origin of the FIB method and the standard methods used today for lift-out and sharpening, using the annular milling method as applied to atom probe tomography specimens. Key steps for enabling correlative analysis with transmission electron-beam backscatter diffraction, transmission electron microscopy, and atom probe tomography are presented, and strategies for preparing specimens for modern microelectronic device structures are reviewed and discussed in detail. Examples are used for discussion of the steps for each of these methods. We conclude with examples of the challenges presented by complex topologies such as nanowires, nanoparticles, and organic materials.

Keywords

focused ion beamtransmission electron microscopyatom probe tomographyspecimen preparationtransmission electron backscatter diffraction
Type
Invited Reviews
Information
Microscopy and Microanalysis , Volume 23 , Special Issue 2: Atom Probe Tomography & Microscopy 2016 , April 2017 , pp. 194 - 209
Copyright
© Microscopy Society of America 2017 

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