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Absolute Thickness Imaging of PMMA Layer on Corrugated Transparent Substrate by Scanning White Light Interference Microscope

Published online by Cambridge University Press:  31 July 2006

M Jobin  and
R Foschia
M Jobin
Affiliation:
University of Applied Science,Switzerland
R Foschia
Affiliation:
University of Applied Science,Switzerland

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1774 - 1775
Copyright
© 2006 Microscopy Society of America