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Added Information to TEM Samples by Chemical Stain – Applications to Silicon Devices

Published online by Cambridge University Press:  31 July 2006

L Tsung ,
A Anciso ,
D Matheson  and
R Turner
L Tsung
Affiliation:
Texas Instruments
A Anciso
Affiliation:
Texas Instruments
D Matheson
Affiliation:
Texas Instruments
R Turner
Affiliation:
Texas Instruments

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1626 - 1627
Copyright
© 2006 Microscopy Society of America