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ADF-STEM Imaging of Dopants and Defect Nanoclusters in Si

Published online by Cambridge University Press:  06 August 2003

P. M. Voyles ,
D. A. Muller  and
J. L. Grazul
P. M. Voyles
Affiliation:
Dept. of Materials Science and Engineering, University of Wisconsin – Madison, 1509 University Ave., Madison, WI, 53706-1595; voyles@engr.wisc.edu
D. A. Muller
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave., Murray Hill, NJ 07974-0636
J. L. Grazul
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave., Murray Hill, NJ 07974-0636

Abstract

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Type
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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 22 - 23
Copyright
Copyright © Microscopy Society of America 2003