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Atom Probe Tomography: A Technique for Nanoscale Characterization

Published online by Cambridge University Press:  01 June 2004

M.K. Miller  and
E.A. Kenik
M.K. Miller
Affiliation:
Microscopy, Microanalysis, Microstructures Group, Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831-6136, USA
E.A. Kenik
Affiliation:
Microscopy, Microanalysis, Microstructures Group, Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831-6136, USA
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Abstract

Atom probe tomography is a technique for the nanoscale characterization of microstructural features. Analytical techniques have been developed to estimate the size, composition, and other parameters of features as small as 1 nm from the atom probe tomography data. These methods are outlined and illustrated with examples of yttrium-, titanium-, and oxygen-enriched particles in a mechanically alloyed, oxide-dispersion-strengthened steel.

Keywords

atom probemicrostructural characterization
Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue 3 , June 2004 , pp. 336 - 341
Copyright
© 2004 Microscopy Society of America

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References

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