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Beam Characterization for Scanning Electron Microscopes by the RPS and IPC Methods

Published online by Cambridge University Press:  28 September 2015

Tomoyo Sasaki ,
Mitsugu Sato ,
Kishio Hidaka  and
Jin Onuki
Tomoyo Sasaki
Affiliation:
Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka-shi, Ibaraki-ken, 312-8504, Japan Graduate School of Science and Engineering, Ibaraki University, 4-12-1, Nakanarusawa-cho, Hitachi-shi, Ibaraki-ken, 316-8511, Japan
Mitsugu Sato
Affiliation:
Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka-shi, Ibaraki-ken, 312-8504, Japan
Kishio Hidaka
Affiliation:
Department of Education, Art and Science, Yamagata University, 1-4-12, Kojirakawamachi, Yamagata-shi, Yamagata-ken, 990-8560, Japan
Jin Onuki
Affiliation:
Graduate School of Science and Engineering, Ibaraki University, 4-12-1, Nakanarusawa-cho, Hitachi-shi, Ibaraki-ken, 316-8511, Japan

Abstract

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Type
Electron Optics
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 54 - 59
Copyright
Copyright © Microscopy Society of America 2015 

References

[1]Sato, M in Handbook of Charged Particle Optics (ed. J Orloff, (CRC, New York) p. 391.Google Scholar
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[4]Reimer, L in Scanning Electron Microscopy. Springer, Berlin)p. 32.Google Scholar
[5]Barth, JE & Kruit, P, Optik 101 (1996). p. 101.Google Scholar
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[8]Sato, M, et al, Nucl. Instrum. Meth. A 519 (2004). p. 280.CrossRefGoogle Scholar
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[10] The authors are grateful to Dr. A. M. Blackburn for his valuable comments to this work.Google Scholar