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Correlative Analysis in the Semiconductor Industry

Published online by Cambridge University Press:  05 August 2019

DJ Larson ,
TJ Prosa ,
I Martin ,
A-S Robbes ,
A Merkulov ,
N Bernier ,
V Delaye ,
P van der Heide ,
O Dulac  and
DA Reinhard
...Show all authors
DJ Larson*
Affiliation:
CAMECA Instrument Inc., Madison WI, USA.
TJ Prosa
Affiliation:
CAMECA Instrument Inc., Madison WI, USA.
I Martin
Affiliation:
CAMECA Instrument Inc., Madison WI, USA.
A-S Robbes
Affiliation:
Cameca SAS, Gennevilliers, France.
A Merkulov
Affiliation:
Cameca SAS, Gennevilliers, France.
N Bernier
Affiliation:
Université Grenoble Alpes, CEA, LETI, Grenoble, France.
V Delaye
Affiliation:
Université Grenoble Alpes, CEA, LETI, Grenoble, France.
P van der Heide
Affiliation:
IMEC, Leuven, Belgium.
O Dulac
Affiliation:
Cameca SAS, Gennevilliers, France.
DA Reinhard
Affiliation:
CAMECA Instrument Inc., Madison WI, USA.
RM Ulfig
Affiliation:
CAMECA Instrument Inc., Madison WI, USA.
*
*Corresponding author: david.larson@ametek.com

Abstract

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Type
New Frontiers in Atom Probe Tomography Applications
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 2502 - 2503
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]van der Heide, P, J. Vac. Sci. Technol. B 36 (2018), p. 03F105.Google Scholar
[2]Ehrke, HU et al. , J. Vac. Sci. Technol. B 28 (2010), p. C1C54.Google Scholar
[3]Stevie, FA in “Secondary Ion Mass Spectrometry”, (Momentum Press, New York).Google Scholar
[4]Vandervorst, W et al. , Mat. Sci. Semi. Proc 62 (2017) 31.Google Scholar
[5]Giddings, AD et al. , Scr. Mater. 148 (2018), p. 82.Google Scholar
[6]This project received funding from the Electronic Component Systems for European Leadership Joint Undertaking under agreement No 692527. It receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, Belgium, France, Hungary, Ireland, Denmark, Israel. Work done on the PlatForm for NanoCharacterisation (PFNC) was additionally supported by the “Recherches Technologiques de Base” Program of the French Ministry of Research.Google Scholar