Hostname: page-component-78c5997874-j824f Total loading time: 0 Render date: 2024-11-10T05:43:02.120Z Has data issue: false hasContentIssue false

Deep-Learning Based Autofocus Score Prediction of Scanning Electron Microscope

Published online by Cambridge University Press:  05 August 2019

Huisoo Kim
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea.
Moohyun Oh
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea.
Heerang Lee
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea.
Jonggyu Jang
Affiliation:
Ulsan National Institute of Science and Technology, UNIST-gil 50, Ulsan 44919, Korea.
Myeung Un Kim
Affiliation:
Ulsan National Institute of Science and Technology, UNIST-gil 50, Ulsan 44919, Korea.
Hyun Jong Yang*
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea. Ulsan National Institute of Science and Technology, UNIST-gil 50, Ulsan 44919, Korea.
Michael Ryoo
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea.
Junhee Lee
Affiliation:
Coxem Co. Ltd, Techno 2-ro 199, Yuseong-gu, Daejeon 34025, Korea.
*
*corresponding author

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Data Acquisition Schemes, Machine Learning Algorithms, and Open Source Software Development for Electron Microscopy
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Santos, A. et al. , Journal of Microscopy 188 (1997) p. 264-272.Google Scholar
[2]Yao, Y. et al. , SPIE (2006) p. 1-12.Google Scholar
[3]Simonyan, K. and Zisserman, A., ICLR (2015) p. 1-14.Google Scholar
[4]He, K. et al. , IEEE CVPR (2016) p. 770-778.Google Scholar