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Development of LVSEM-EDS Analyzer Utilizing Superconducting X-ray Detector Toward Nanometer-scale Elemental Mapping of CFRP/Adhesive Interface

Published online by Cambridge University Press:  05 August 2019

Go Fujii*
Affiliation:
Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1, Umezono, Tsukuba, Ibaraki, Japan.
Masahiro Ukibe
Affiliation:
Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1, Umezono, Tsukuba, Ibaraki, Japan.
Shigetomo Shiki
Affiliation:
Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1, Umezono, Tsukuba, Ibaraki, Japan.
Masataka Ohkubo
Affiliation:
Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1, Umezono, Tsukuba, Ibaraki, Japan.
*
*Corresponding author: go-fujii@aist.go.jp

Abstract

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Type
Low-Energy X-Ray Analysis: Novel Applications Using Soft X-Ray Emission Spectroscopy (SXES), Cathodoluminescence (CL), and Synchrotron Techniques
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Wuhrer, R and Moran, K, IOP Conf. Ser.: Mater. Sci. Eng. 109 (2016), p. 012019.Google Scholar
[2]Schlosser, DM et al. , Nucl. Inst. Methods in Phys. 624 (2010), p. 270.Google Scholar
[3]Ukibe, M. et al. , J. Low. Temp. Phys. 184 (2016), p. 200.Google Scholar
[4]Fujii, G et al. , X-ray spectrometry 46 (2017), p. 325.Google Scholar
[5]This work was supported by Innovative Science and Technology Initiative for Security, ATLA, Japan.Google Scholar