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Development of New Analytical Approaches by a 300 keV CFE-TEM/STEM

Published online by Cambridge University Press:  31 July 2006

Y Taniguchi
Affiliation:
Hitachi High-Technologies Corporation
T Furutsu
Affiliation:
Hitachi High-Technologies Corporation
M Otsuka
Affiliation:
Hitachi High-Technologies Corporation
K Nakamura
Affiliation:
Hitachi High-Technologies Corporation
T Hashimoto
Affiliation:
Hitachi High-Technologies Corporation
M Konno
Affiliation:
Hitachi High-Technologies Corporation
T Yaguchi
Affiliation:
Hitachi High-Technologies Corporation
S Terada
Affiliation:
Central Research Laboratory,Hitachi Ltd
K Kaji
Affiliation:
Central Research Laboratory,Hitachi Ltd
M Koguchi
Affiliation:
Central Research Laboratory,Hitachi Ltd
T Matsumoto
Affiliation:
Central Research Laboratory,Hitachi Ltd

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Copyright
© 2006 Microscopy Society of America