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EBSD Image Quality Mapping

Published online by Cambridge University Press:  09 December 2005

Stuart I. Wright
Affiliation:
EDAX-TSL, 392 East 12300 South, Draper, Utah 84020, USA
Matthew M. Nowell
Affiliation:
EDAX-TSL, 392 East 12300 South, Draper, Utah 84020, USA
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Abstract

Image quality (IQ) maps constructed from electron backscatter diffraction data provide useful visualizations of microstructure. The contrast in these maps arises from a variety of sources, including phase, strain, topography, and grain boundaries. IQ maps constructed using various IQ metrics are compared to identify the most prominent contrast mechanism for each metric. The conventional IQ metric was found to provide the superior grain boundary and strain contrast, whereas an IQ metric based on the average overall intensity of the diffraction patterns was found to provide better topological and phase contrast.

Type
MICROANALYSIS
Copyright
2006 Microscopy Society of America

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References

REFERENCES

Adams, B.L., Wright, S.I., & Kunze, K. (1993). Orientation imaging: The emergence of a new microscopy. Met Trans 24A, 819831.Google Scholar
Cullity, B.D. (1956). Elements of X-Ray Diffraction. Reading, MA: Addison-Wesley.
Katrakova, D. & Mucklich, F. (2001). Specimen preparation and electron backscatter diffraction—Part I: Metals. Practical Metallogr 38, 547565.Google Scholar
Katrakova, D. & Mucklich, F. (2002). Specimen preparation for electron backscatter diffraction (EBSD). II. Ceramics. Practical Metallogr 39, 644662.Google Scholar
Krieger Lassen, N.C. (1998). Automatic high-precision measurements of the location and width of Kikuchi bands in electron backscatter diffraction patterns. J Microsc 190, 375391.Google Scholar
Krieger Lassen, N.C., Conradsen, K., & Juul Jensen, D. (1992). Image processing procedures for analysis of electron back scattering patterns. Scan Microsc 6, 115121.Google Scholar
Kunze, K., Wright, S.I., Adams, B.L., & Dingley, D.J. (1993). Advances in automatic EBSP single orientation measurements. Texture Microstruct 20, 4154.Google Scholar
Leavers, V.F. (1992). Shape Detection in Computer Vision Using the Hough Transform. New York: Springer-Verlag.
Nowell, M.M. (2002). Ion beam preparation of passivated copper integrated circuit structures for electron backscatter diffraction/orientation imaging microscopy analysis. J Electron Mater 31, 2332.Google Scholar
Nowell, M.M. & Wright, S.I. (2004). Phase differentiation via combined EBSD and XEDS. J Microsc 213, 296305.Google Scholar
Nowell, M.M. & Wright, S.I. (2005). Orientation effects on indexing of electron backscatter diffraction patterns. Ultramicroscopy 103, 4158.Google Scholar
Prior, D.J., Trimby, P.W., Weber, U.D., & Dingley, D.J. (1996). Orientation contrast imaging of microstructures rocks using forescatter detectors in the scanning electron-microscope. Mineralog Mag 60, 859869.Google Scholar
Tao, X. (2003). An EBSD study on mapping of small orientation differences in lattice mismatched heterostructures. Ph.D. Thesis, Lehigh University.
Tao, X. & Eades, A. (2004). Monte Carlo simulation for electron backscattering diffraction. Microsc Microanal 10(Suppl. 2), 940941.Google Scholar
Tao, X. & Eades, A. (2005). Errors, artifacts and improvements in EBSD processing and mapping. Microsc Microanal 11, 7987.Google Scholar