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Electron Source Brightness and Illumination Semi-Angle Distribution Measurement in a Transmission Electron Microscope

Published online by Cambridge University Press:  21 May 2018

Felix Börrnert ,
Julian Renner  and
Ute Kaiser
Felix Börrnert
Affiliation:
Materialwissenschaftliche Elektronenmikroskopie, Universität Ulm, Albert-Einstein-Allee 11, 89081 Ulm, Germany
Julian Renner
Affiliation:
Materialwissenschaftliche Elektronenmikroskopie, Universität Ulm, Albert-Einstein-Allee 11, 89081 Ulm, Germany
Ute Kaiser
Affiliation:
Materialwissenschaftliche Elektronenmikroskopie, Universität Ulm, Albert-Einstein-Allee 11, 89081 Ulm, Germany
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Abstract

The electron source brightness is an important parameter of an electron microscope. Reliable and easy brightness measurement routes are not easily found. A determination method for the illumination semi-angle distribution in transmission electron microscopy is even less well documented. Herein, we report a facile measurement route for both entities and demonstrate it on a state-of-the-art instrument. The reduced axial brightness of the FEI X-FEG with a monochromator was determined to be larger than 108 A/(m2 sr V).

Keywords

TEMelectron sourcebrightnessoptical parameterselectron microscopy
Type
Software and Instrumentation
Information
Microscopy and Microanalysis , Volume 24 , Issue 3 , June 2018 , pp. 249 - 255
Copyright
© Microscopy Society of America 2018 

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Footnotes

Cite this article: Börrnert F, Renner J, Kaiser U (2018) Electron Source Brightness and Illumination Semi-Angle Distribution Measurement in a Transmission Electron Microscope. Microsc Microanal24(3): 249–255. doi: 10.1017/S1431927618000223

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