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Electron-Beam Shaping

Published online by Cambridge University Press:  23 September 2015

Roy Shiloh ,
Roei Remez  and
Ady Arie
Roy Shiloh
Affiliation:
Department of Physical Electronics, Fleischman Faculty of Engineering, Tel Aviv University, Tel Aviv 6997801, Israel
Roei Remez
Affiliation:
Department of Physical Electronics, Fleischman Faculty of Engineering, Tel Aviv University, Tel Aviv 6997801, Israel
Ady Arie
Affiliation:
Department of Physical Electronics, Fleischman Faculty of Engineering, Tel Aviv University, Tel Aviv 6997801, Israel

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2305 - 2306
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Shiloh, R., et al, Ultramicroscopy 144 (2014) 26.CrossRefGoogle Scholar
[2] Scherzer, O., Zeitschrift fur Physik 101 (1936) 593.Google Scholar
[3] Haider, M., et al, Nature 392 (1998) 768.Google Scholar
[4] Ito, Y., et al, Nature 394 (1998) 49.Google Scholar
[5] The work was supported by the Israel Science Foundation, grant no. 1310/13, and by DIP, the German-Israeli Project cooperation..Google Scholar
[6] Presentation of this work in M&M2015 is made possible by a travel grant from the Israeli Ministry of Science and Technology.Google Scholar