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Elemental Quantification and Visualization of GaN Structures using APT and SIMS

Published online by Cambridge University Press:  27 August 2014

A. D. Giddings ,
T. J. Prosa ,
A. Merkulov ,
F. A. Stevie ,
H. G. Francois-Saint-Cyr ,
N. G. Young ,
J. S. Speck  and
D. J. Larson
A. D. Giddings
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
T. J. Prosa
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
A. Merkulov
Affiliation:
CAMECA SAS, 29 Quai des Grésillons, 92622 Gennevilliers Cedex, France.
F. A. Stevie
Affiliation:
North Carolina State University, 2410 Campus Shore Drive, Raleigh, NC 27695, USA.
H. G. Francois-Saint-Cyr
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
N. G. Young
Affiliation:
Department of Materials, University of California, Santa Barbara, CA 93106, USA.
J. S. Speck
Affiliation:
Department of Materials, University of California, Santa Barbara, CA 93106, USA.
D. J. Larson
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 2112 - 2113
Copyright
Copyright © Microscopy Society of America 2014 

References

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[3] Prosa, T. J., et al., Ultramicroscopy 132 (2013) p. 179.Google Scholar
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