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ESEM Beam Current Measuring Device based on a Planar Schottky Diode

Published online by Cambridge University Press:  01 August 2002

André-Sébastien Aubin ,
Dominique Drouin  and
Matthew R Phillips
André-Sébastien Aubin
Affiliation:
Microelectronics Research Group, Electrical and computer engineering department, Université de Sherbrooke, Sherbrooke (Québec), J1K 2R1, Canada
Dominique Drouin
Affiliation:
Microelectronics Research Group, Electrical and computer engineering department, Université de Sherbrooke, Sherbrooke (Québec), J1K 2R1, Canada
Matthew R Phillips
Affiliation:
MAU, University of Technology, Sydney, PO Box 123, Broadway, NSW 2007, Australia

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1538 - 1539
Copyright
Copyright © Microscopy Society of America 2002