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Facility Implementation and Comparative Performance Evaluation of Probe-Corrected TEM/STEM with Schottky and Cold Field Emission Illumination

Published online by Cambridge University Press:  05 March 2013

Yan Xin ,
John Kynoch ,
Ke Han ,
Zhiyong Liang ,
Peter J. Lee ,
David C. Larbalestier ,
Yi-Feng Su ,
Kohei Nagahata ,
Toshihiro Aoki  and
Paolo Longo
Yan Xin*
Affiliation:
National High Magnetic Field Laboratory, Florida State University, Tallahassee, FL 32310, USA
John Kynoch
Affiliation:
National High Magnetic Field Laboratory, Florida State University, Tallahassee, FL 32310, USA
Ke Han
Affiliation:
National High Magnetic Field Laboratory, Florida State University, Tallahassee, FL 32310, USA
Zhiyong Liang
Affiliation:
High Performance Materials Institute, FAMU-FSU College of Engineering, Tallahassee, FL 32310, USA
Peter J. Lee
Affiliation:
Applied Superconductor Center, Florida State University, Tallahassee, FL 32310, USA
David C. Larbalestier
Affiliation:
Applied Superconductor Center, Florida State University, Tallahassee, FL 32310, USA
Yi-Feng Su
Affiliation:
High Performance Materials Institute, FAMU-FSU College of Engineering, Tallahassee, FL 32310, USA
Kohei Nagahata
Affiliation:
JEOL USA Inc., 11 Dearborn Road, Peabody, MA 01960, USA
Toshihiro Aoki
Affiliation:
JEOL USA Inc., 11 Dearborn Road, Peabody, MA 01960, USA
Paolo Longo
Affiliation:
Gatan, Inc., Pleasanton, CA 94588, USA
*
*Corresponding author. E-mail: xin@magnet.fsu.edu
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Abstract

We report the installation and performance evaluation of a probe aberration-corrected high-resolution JEOL JEM-ARM200F transmission electron microscope (TEM). We provide details on construction of the room that enables us to obtain scanning transmission electron microscope (STEM) data without any evident distortions/noise from the external environment. The microscope routinely delivers expected performance. We show that the highest STEM spatial resolution and energy resolution achieved with this microscope are 0.078 nm and 0.34 eV, respectively. We report a direct comparative evaluation of the performance of this microscope with a Schottky thermal field-emission gun versus a cold field-emission gun. Cold field-emission illumination improves spatial resolution of the high current probe for analytical spectroscopy, the TEM information limit, and the electron energy resolution compared to the Schottky thermal field-emission source.

Keywords

JEM-ARM200cFaberration correctedSTEMthermal FEGcold FEG
Type
Software, Techniques, and Equipment Development
Information
Microscopy and Microanalysis , Volume 19 , Issue 2 , April 2013 , pp. 487 - 495
Copyright
Copyright © Microscopy Society of America 2013

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