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FIB Plan and Side View Cross-Sectional TEM Sample Preparation of Nanostructures

Published online by Cambridge University Press:  13 November 2013

Filip Lenrick ,
Martin Ek ,
Daniel Jacobsson ,
Magnus T. Borgström  and
L. Reine Wallenberg
Filip Lenrick*
Affiliation:
nCHREM/Center for Analysis and Synthesis, Lund University, Box 124, SE-221 00 Lund, Sweden
Martin Ek
Affiliation:
nCHREM/Center for Analysis and Synthesis, Lund University, Box 124, SE-221 00 Lund, Sweden
Daniel Jacobsson
Affiliation:
Division of Solid State Physics, Lund University, Box 118, SE-221 00 Lund, Sweden
Magnus T. Borgström
Affiliation:
Division of Solid State Physics, Lund University, Box 118, SE-221 00 Lund, Sweden
L. Reine Wallenberg
Affiliation:
nCHREM/Center for Analysis and Synthesis, Lund University, Box 124, SE-221 00 Lund, Sweden
*
*Corresponding author. E-mail: filip.lenrick@polymat.lth.se
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Abstract

Focused ion beam is a powerful method for cross-sectional transmission electron microscope sample preparation due to being site specific and not limited to certain materials. It has, however, been difficult to apply to many nanostructured materials as they are prone to damage due to extending from the surface. Here we show methods for focused ion beam sample preparation for transmission electron microscopy analysis of such materials, demonstrated on GaAs–GaInP core shell nanowires. We use polymer resin as support and protection and are able to produce cross-sections both perpendicular to and parallel with the substrate surface with minimal damage. Consequently, nanowires grown perpendicular to the substrates could be imaged both in plan and side view, including the nanowire–substrate interface in the latter case. Using the methods presented here we could analyze the faceting and homogeneity of hundreds of adjacent nanowires in a single lamella.

Keywords

FIBTEMnanostructuresnanowiressample preparationMOVPE
Type
Techniques, Software, and Instrumentation Development
Information
Microscopy and Microanalysis , Volume 20 , Issue 1 , February 2014 , pp. 133 - 140
Copyright
Copyright © Microscopy Society of America 2014 

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