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Generation of Spurious X-rays by Focused Ion Beams in Dual Beam Instruments

Published online by Cambridge University Press:  31 July 2006

J Evertsen ,
M Toth ,
B Thiel  and
E Lifshin
J Evertsen
Affiliation:
SUNY at Albany
M Toth
Affiliation:
FEI Company
B Thiel
Affiliation:
SUNY at Albany
E Lifshin
Affiliation:
SUNY at Albany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1250 - 1251
Copyright
© 2006 Microscopy Society of America