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High Dynamic Range Pixel Array Detector for Scanning Transmission Electron Microscopy

Published online by Cambridge University Press:  11 January 2016

Mark W. Tate ,
Prafull Purohit ,
Darol Chamberlain ,
Kayla X. Nguyen Open the ORCID record for Kayla X. Nguyen [Opens in a new window] ,
Robert Hovden ,
Celesta S. Chang ,
Pratiti Deb ,
Emrah Turgut ,
John T. Heron  and
Darrell G. Schlom Open the ORCID record for Darrell G. Schlom [Opens in a new window]
...Show all authors
Mark W. Tate
Affiliation:
Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, NY 14853, USA
Prafull Purohit
Affiliation:
Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, NY 14853, USA
Darol Chamberlain
Affiliation:
Cornell High Energy Synchrotron Source (CHESS), Cornell University, Ithaca, NY 14853, USA
Kayla X. Nguyen
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA
Robert Hovden
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA
Celesta S. Chang
Affiliation:
Physics Department, Cornell University, Ithaca, NY 14853, USA
Pratiti Deb
Affiliation:
Physics Department, Cornell University, Ithaca, NY 14853, USA
Emrah Turgut
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA
John T. Heron
Affiliation:
Physics Department, Cornell University, Ithaca, NY 14853, USA Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853, USA
Darrell G. Schlom
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853, USA Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY 14853, USA
Daniel C. Ralph
Affiliation:
Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, NY 14853, USA Physics Department, Cornell University, Ithaca, NY 14853, USA Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY 14853, USA
Gregory D. Fuchs
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY 14853, USA
Katherine S. Shanks
Affiliation:
Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, NY 14853, USA
Hugh T. Philipp
Affiliation:
Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, NY 14853, USA
David A. Muller*
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY 14853, USA
Sol M. Gruner
Affiliation:
Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, NY 14853, USA Cornell High Energy Synchrotron Source (CHESS), Cornell University, Ithaca, NY 14853, USA Physics Department, Cornell University, Ithaca, NY 14853, USA Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY 14853, USA
*
*Corresponding author. david.a.muller@cornell.edu
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Abstract

We describe a hybrid pixel array detector (electron microscope pixel array detector, or EMPAD) adapted for use in electron microscope applications, especially as a universal detector for scanning transmission electron microscopy. The 128×128 pixel detector consists of a 500 µm thick silicon diode array bump-bonded pixel-by-pixel to an application-specific integrated circuit. The in-pixel circuitry provides a 1,000,000:1 dynamic range within a single frame, allowing the direct electron beam to be imaged while still maintaining single electron sensitivity. A 1.1 kHz framing rate enables rapid data collection and minimizes sample drift distortions while scanning. By capturing the entire unsaturated diffraction pattern in scanning mode, one can simultaneously capture bright field, dark field, and phase contrast information, as well as being able to analyze the full scattering distribution, allowing true center of mass imaging. The scattering is recorded on an absolute scale, so that information such as local sample thickness can be directly determined. This paper describes the detector architecture, data acquisition system, and preliminary results from experiments with 80–200 keV electron beams.

Keywords

pixel array detector (PAD)STEMhigh dynamic rangemixed-mode pixel array detector (MM-PAD)electron microscope pixel array detector (EMPAD)
Type
Techniques, Software, and Equipment
Information
Microscopy and Microanalysis , Volume 22 , Issue 1 , February 2016 , pp. 237 - 249
Copyright
© Microscopy Society of America 2016 

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