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Improved Pump Down Time with Evactron® Turbo Plasma™ Cleaning

Published online by Cambridge University Press:  04 August 2017

Ewa Kosmowska
Affiliation:
XEI Scientific, Inc., Redwood City, CAUSA.
Michael Cable
Affiliation:
XEI Scientific, Inc., Redwood City, CAUSA.
Barbara Armbruster
Affiliation:
XEI Scientific, Inc., Redwood City, CAUSA.
Ronald Vane
Affiliation:
XEI Scientific, Inc., Redwood City, CAUSA.

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

[1] Vane, R. (2013). Microsc. Microanal. 19(2), 1338.CrossRefGoogle Scholar
[2] Kobayashi, H. (2010). J. Phy. So. JPN 53(10), 568572.Google Scholar