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Interfacial Structure and Electrical Properties of Transparent Conducting ZnO Thin Films on Polymer Substrates

Published online by Cambridge University Press:  06 August 2013

Young Soo Lim ,
Dae Wook Kim ,
Jong-Ho Kang ,
Seul Gi Seo ,
Bo Bae Kim ,
Hyoung-Seuk Choi ,
Won-Seon Seo ,
Yong Soo Cho  and
Hyung-Ho Park
Young Soo Lim
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea
Dae Wook Kim
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Jong-Ho Kang
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Seul Gi Seo
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Bo Bae Kim
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Hyoung-Seuk Choi
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea
Won-Seon Seo*
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea
Yong Soo Cho
Affiliation:
Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Hyung-Ho Park
Affiliation:
Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
*
*Corresponding author. E-mail: wsseo@kicet.re.kr
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Abstract

The effects of polymer substrates on the interfacial structure and the thermal stability of Ga-doped ZnO (GZO) thin films were investigated. The GZO thin films were deposited on polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) substrates by rf-magnetron sputtering at room temperature, and thermal stability tests of the GZO thin films on the polymer substrates were performed at 150°C up to 8 h in air. Electrical and structural characterizations of the GZO thin films on the PET and the PEN substrates were carried out, and the origins of the stable interfacial structure and the improved thermal stability of the GZO thin film on the PEN substrate were discussed.

Keywords

zinc oxidetransparent conducting oxidesputteringthermal stabilityoligomer
Type
Research Article
Information
Microscopy and Microanalysis , Volume 19 , Supplement S5: IUMAS , August 2013 , pp. 131 - 135
Copyright
Copyright © Microscopy Society of America 2013 

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