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Investigations of Dopant Clustering in Si via Radial Distribution Function

Published online by Cambridge University Press:  31 July 2006

K Thompson
Affiliation:
Imago Scientific Instruments
G Brian
Affiliation:
Imago Scientific Instruments
SS A Gerstl
Affiliation:
Imago Scientific Instruments
J Sebastian
Affiliation:
Imago Scientific Instruments

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Copyright
© 2006 Microscopy Society of America