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Level Set Methods for Modelling Field Evaporation in Atom Probe

Published online by Cambridge University Press:  28 August 2013

Daniel Haley ,
Michael P. Moody  and
George D.W. Smith
Daniel Haley*
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK
Michael P. Moody
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK
George D.W. Smith
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK
*
*Corresponding author. E-mail: d.haley@mpie.de
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Abstract

Atom probe is a nanoscale technique for creating three-dimensional spatially and chemically resolved point datasets, primarily of metallic or semiconductor materials. While atom probe can achieve local high-level resolution, the spatial coherence of the technique is highly dependent upon the evaporative physics in the material and can often result in large geometric distortions in experimental results. The distortions originate from uncertainties in the projection function between the field evaporating specimen and the ion detector. Here we explore the possibility of continuum numerical approximations to the evaporative behavior during an atom probe experiment, and the subsequent propagation of ions to the detector, with particular emphasis placed on the solution of axisymmetric systems, such as isolated particles and multilayer systems. Ultimately, this method may prove critical in rapid modeling of tip shape evolution in atom probe tomography, which itself is a key factor in the rapid generation of spatially accurate reconstructions in atom probe datasets.

Keywords

atom probecomputational modelingfield evaporationcharacterization
Type
Techniques and Instrumentation Development
Information
Microscopy and Microanalysis , Volume 19 , Issue 6 , December 2013 , pp. 1709 - 1717
Copyright
Copyright © Microscopy Society of America 2013 

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