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Measuring the Roughness of Buried Interfaces in Nanostructures by Local Electrode Atom Probe (LEAP®) Analysis

Published online by Cambridge University Press:  31 July 2006

RW O'Neill ,
DJ Larson ,
K Thompson ,
TC Kunicki  and
B Geiser
RW O'Neill
Affiliation:
Imago Scientific Instruments Corporation
DJ Larson
Affiliation:
Imago Scientific Instruments Corporation
K Thompson
Affiliation:
Imago Scientific Instruments Corporation
TC Kunicki
Affiliation:
Imago Scientific Instruments Corporation
B Geiser
Affiliation:
Imago Scientific Instruments Corporation

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1746 - 1747
Copyright
© 2006 Microscopy Society of America