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Minimizing Errors in Electron Microprobe Analysis

Published online by Cambridge University Press:  02 February 2002

Eric Lifshin  and
Raynald Gauvin
Eric Lifshin*
Affiliation:
New York State Corporate Center for Advanced Thin Film Technology, State University of New York at Albany, Albany, NY
Raynald Gauvin
Affiliation:
Department of Mechanical Engineering, University de Sherbrooke, Quebec, Canada, J1K 2R1
*
*Corresponding author, at University at Albany, State University of New York, CESTM, 251 Fuller Road, Albany, NY 12203.
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Abstract

Errors in quantitative electron microprobe analysis arise from many sources including those associated with sampling, specimen preparation, instrument operation, data collection, and analysis. The relative magnitudes of some of these factors are assessed for a sample of NiAl used to demonstrate important concerns in the analysis of even a relatively simple system measured under standard operating conditions. The results presented are intended to serve more as a guideline for developing an analytical strategy than as a detailed error propagation model that includes all possible sources of variability and inaccuracy. The use of a variety of tools to assess errors is demonstrated. It is also shown that, as sample characteristics depart from those under which many of the quantitative methods were developed, errors can increase significantly.

Keywords

precisionaccuracyquantitative analysisenergy-dispersive X-ray spectrometrycrystal diffraction spectrometryMonte Carlo calculationsX-ray counting statistics
Type
Research Article
Information
Microscopy and Microanalysis , Volume 7 , Issue 2 , March 2001 , pp. 168 - 177
Copyright
Copyright © Microscopy Society of America 2001

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