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Modeling Image Distortions in 3DAP

Published online by Cambridge University Press:  01 June 2004

F. Vurpillot ,
A. Cerezo ,
D. Blavette  and
D.J. Larson
F. Vurpillot
Affiliation:
Groupe de Physique des Materiaux, Unite Mixte de Recherche, CNRS 6634, Université de Rouen, 76801 Saint Etienne du Rouvray cedex, France
A. Cerezo
Affiliation:
Department of Materials, University of Oxford, Oxford, OX1 3PH, UK
D. Blavette
Affiliation:
Groupe de Physique des Materiaux, Unite Mixte de Recherche, CNRS 6634, Université de Rouen, 76801 Saint Etienne du Rouvray cedex, France
D.J. Larson
Affiliation:
Recording Head Operations, Seagate Technology, Minneapolis, MN 55435, USA
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Abstract

A numerical model has been developed to simulate images obtained from the three-dimensional atom probe. This model was used to simulate the artefacts commonly observed in two-phase materials. This model takes into account the dynamic evolution of the atomic-scale shape of the specimen during field evaporation. This article reviews the model and its applications to some specific cases. Local magnification effects were studied as a function of the size, the shape, and the orientation of precipitated phases embedded in the matrix. Small precipitates produce large aberrations in good agreement with experiments. The magnification from such precipitates, as measured from the simulation, is only found to match the theoretical value for mesoscopic scale precipitates (size similar to the specimen size). Orientation effects are also observed in excellent agreement with experiments. The measured thickness of a grain-boundary-segregated film in the simulation is found to decrease with the angle between the normal to the grain boundary and the tip axis. Depth scaling artefacts caused by variation in the evaporation field of atoms in multilayer structures were successfully simulated and again showed good agreement with effects observed experimentally.

Keywords

atom probesimulationmultilayers
Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue 3 , June 2004 , pp. 384 - 390
Copyright
© 2004 Microscopy Society of America

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References

REFERENCES

Bas, P., Bostel, A., Deconihout, B., & Blavette, D. (1995). A general protocol for the reconstruction of 3D atom probe data. Appl Surf Sci 87/88, 298–304.Google Scholar
Blavette, D., Vurpillot, F., Pareige, P., & Menand, A. (2001). A model accounting for the spatial overlap in three dimensional atom probe. Ultramicroscopy 89, 145–153.Google Scholar
Hecker, M., Pompe, W., Schneider, C.M., Thomas, J., Ullrich, A., & Wetzig, K. (2001). Thermal stability of nanoscale Co/Cu multilayers. Z Metallkd 92, 7.Google Scholar
Larson, D.J., Clifton, P.H., Tabat, N., Cerezo, A., Petford-Long, A.K., Martens, R.L., & Kelly, T.F. (2000). Atomic scale analysis of CoFe/Cu and CoFe/NiFe interfaces. Appl Phys Lett 77, 726–729.Google Scholar
Larson, D.J., Wissman, B.D., Viellieux, R.J., Martens, R.L., Gribb, T.T., Erskine, H.F., Kelly, T.F., & Tabat, N. (2001). Advances in atom probe specimen fabrication from planar multilayer thin film structures. Microsc Microanal 7, 24–31.Google Scholar
Letellier, L. (1994). Etude desjants de grains et interphases dans les superalliages Astroloy par microscopie electronique et tomographie atomique. Ph.D. thesis. Rouen, France: University of Rouen.
Miller, M.K. (2000). Atom Probe Tomography Analysis at the Atomic Scale. New York: Kluwer Academic/Plenum Publishers.
Miller, M.K., Cerezo, A., Hetherington, M.G., & Smith, G.D.W. (1996). Atom Probe Field Ion Microscopy. Oxford, UK: Oxford University Press.
Miller, M.K. & Hetherington, M.G. (1991). Local magnification effects in the atom probe. Surf Sci 61, 442.Google Scholar
Müller, E.W. (1956). Field desorption. Phys Rev 102, 618.Google Scholar
Pareige, P. (1996). Etude de la précipitation du cuivre dans les aciers de cure de centrale nucleaire par doncle atomique. Ph.D. Thesis. Rouen, France: University of Rouen.
Smith, R. & Walls, J.M. (1978). Ion trajectories in the field ion microscope. J Phys D: Appl Phys 11, 409–419.Google Scholar
Vurpillot, F., Bostel, A., & Blavette, D. (2000a). Trajectory overlaps and local magnification in three dimensional atom probe. Appl Phys Lett 76, 3127–3130.Google Scholar
Vurpillot, F., Bostel, A., Cadel, E., & Blavette, D. (2000b). The spatial resolution of 3D atom probe in the investigation of single-phase materials. Ultramicroscopy 84, 213–224.Google Scholar
Vurpillot, F., Bostel, A., & Blavette, D. (2001b). A new approach to the interpretation of atom probe field ion microscopy. Ultramicroscopy 89, 137–144.Google Scholar
Vurpillot, F., Da Costa, G., Menand, A., & Blavette, D. (2001a). Structural analyses in three-dimensional atom probe: A Fourier transform approach. J Micros 203, 295–300.Google Scholar
Vurpillot, F., Larson, D.J., & Cerezo, A. (2004). Improvement of multilayer analyses with the 3D atom probe. Surface and Interface Analysis, in press.Google Scholar
Vurpillot, F., Renaud, L., & Blavette, D. (2003). A new step towards the lattice reconstruction in 3DAP. Ultramicroscopy 95, 223–229.Google Scholar
Waugh, A.R., Boyes, E.D., & Southon, M.J. (1976). Investigations of field evaporation with a field-desorption microscope. Surf Sci 61, 109–142.Google Scholar