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Published online by Cambridge University Press: 22 May 2009
A numerical and experimental analysis of the optical beam deflection system used to monitor microcantilevers subjected to simultaneous deflection and twisting such as in lateral or frictional force microscopy was performed. This study focused on two optical beam deflection orientations where in the first case the optical beam and the detector are at a right angle to the length of the cantilever and the second case, which is the more standard orientation, the optical beam is parallel to the length of the lever. This study finds that it is possible to model the twist and the deflection separately and treat each motion independently. Simulations have shown that the above-mentioned systems are equivalent in accuracy and sensitivity for monitoring the simultaneous twist and deflection of cantilevers.