Hostname: page-component-cd9895bd7-gxg78 Total loading time: 0 Render date: 2024-12-29T19:23:43.404Z Has data issue: false hasContentIssue false
  • English
  • Français

Narrow-Beam Argon Ion Milling of Carbon-Supported Ex Situ Lift-Out FIB Specimens

Published online by Cambridge University Press:  04 August 2017

M.J. Campin ,
C.S. Bonifacio ,
H.H. Kang ,
P. Nowakowski ,
M. Boccabella  and
P.E. Fischione
M.J. Campin
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA
C.S. Bonifacio
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA
H.H. Kang
Affiliation:
Center for Complex Analysis, GLOBALFOUNDRIES, Malta, NY, USA
P. Nowakowski
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA
M. Boccabella
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA
P.E. Fischione
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 302 - 303
Copyright
© Microscopy Society of America 2017 

References

[1] Giannuzzi, LA & Stevie, FA Micron 30 1999). p. 197.Google Scholar
[2] Mayer, J, et al, MRS Bull 30 2007). p. 400.CrossRefGoogle Scholar
[3] Muehle, U, et al in Microscopy: Science, technology, applications and education (eds. A Mendez-Vilas & J DiazFORMATEX Badajozp. 1704.Google Scholar
[4] Kang, HH, et al, Conf. Proc. Int. Symp. Test. Failure Anal 2010). p. 102.Google Scholar