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The orientation-dependent growth of epitaxial silicon layers at low temperature

Published online by Cambridge University Press:  05 September 2003

I. Sieber ,
B. Rau ,
P. Schubert-Bischoff ,
I. Urban  and
W. Fuhs
I. Sieber
Affiliation:
Hahn-Meitner-Institut Berlin, Kekuléstr.5, D-12489 Berlin, Germany
B. Rau
Affiliation:
Hahn-Meitner-Institut Berlin, Kekuléstr.5, D-12489 Berlin, Germany
P. Schubert-Bischoff
Affiliation:
Hahn-Meitner-Institut Berlin, Kekuléstr.5, D-12489 Berlin, Germany
I. Urban
Affiliation:
Bundesanstalt für Materialprüfung, Unter den Eichen 87, D-12200 Berlin, Germany
W. Fuhs
Affiliation:
Hahn-Meitner-Institut Berlin, Kekuléstr.5, D-12489 Berlin, Germany
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Abstract

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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 124 - 125
Copyright
Copyright © Microscopy Society of America 2003

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