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Practical Aspects of Removing the Effects of Elastic and Thermal Diffuse Scattering from Spectroscopic Data for Single Crystals

Published online by Cambridge University Press:  23 April 2014

Nathan R. Lugg ,
Melissa J. Neish ,
Scott D. Findlay  and
Leslie J. Allen
Nathan R. Lugg
Affiliation:
School of Physics, The University of Melbourne, Parkville, Victoria 3010, Australia Institute of Engineering Innovation, The University of Tokyo, Tokyo, 116-0013, Japan
Melissa J. Neish
Affiliation:
School of Physics, The University of Melbourne, Parkville, Victoria 3010, Australia
Scott D. Findlay
Affiliation:
School of Physics, Monash University, Clayton, Victoria 3800, Australia
Leslie J. Allen*
Affiliation:
School of Physics, The University of Melbourne, Parkville, Victoria 3010, Australia
*
*Corresponding author. lja@unimelb.edu.au
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Abstract

A method to remove the effects of elastic and thermal diffuse scattering (TDS) of the incident electron probe from electron energy-loss and energy-dispersive X-ray spectroscopy data for atomically resolved spectrum images of single crystals of known thickness is presented. By calculating the distribution of the probe within a specimen of known structure, it is possible to deconvolve the channeling of the probe and TDS from experimental data by reformulating the inelastic cross-section as an inverse problem. In electron energy-loss spectroscopy this allows valid comparisons with first principles fine-structure calculations to be made. In energy-dispersive X-ray spectroscopy, direct compositional analyses such as ζ-factor and Cliff–Lorimer k-factor analysis can be performed without the complications of channeling and TDS. We explore in detail how this method can be incorporated into existing multislice programs, and demonstrate practical considerations in implementing this method using a simulated test specimen. We show the importance of taking into account the scattering of the probe in k-factor analysis in a zone axis orientation. The applicability and limitations of the method are discussed.

Keywords

scanning transmission electron microscopy (STEM)electron energy-loss spectroscopy (EELS)energy-dispersive X-ray spectroscopy (EDX)channeling and thermal diffuse scattering
Type
FEMMS Special Issue
Information
Microscopy and Microanalysis , Volume 20 , Issue 4 , August 2014 , pp. 1078 - 1089
Copyright
© Microscopy Society of America 2014 

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