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Ptychographic Complex Imaging Reflectometry for Spatially-Resolved Dopant Profiling Using a Tabletop EUV Source

Published online by Cambridge University Press:  05 August 2019

Yuka Esashi ,
Christina L. Porter ,
Michael Tanksalvala ,
Galen P. Miley ,
Naoto Horiguchi ,
Joshua L. Knobloch ,
Jihan Zhou ,
Robert M. Karl Jr. ,
Peter Johnsen  and
Charles S. Bevis
...Show all authors
Yuka Esashi*
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA.
Christina L. Porter
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA.
Michael Tanksalvala
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA.
Galen P. Miley
Affiliation:
Department of Chemistry, Northwestern University, Evanston, Illinois 60208, USA.
Naoto Horiguchi
Affiliation:
imec Leuven, Kapeldreef 75, 3001 Leuven, Belgium.
Joshua L. Knobloch
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA.
Jihan Zhou
Affiliation:
Department of Physics & Astronomy and California NanoSystem Institute, University of California, Los Angeles, California 90095, USA.
Robert M. Karl Jr.
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA.
Peter Johnsen
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA.
Charles S. Bevis
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA.
Bin Wang
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA.
Seth L. Cousin
Affiliation:
KMLabs, Inc., Boulder, Colorado, 80301, USA.
Michael Gerrity
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA.
Henry C. Kapteyn
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA. KMLabs, Inc., Boulder, Colorado, 80301, USA.
Margaret M. Murnane
Affiliation:
JILA, University of Colorado, Boulder, Colorado 80309, USA. KMLabs, Inc., Boulder, Colorado, 80301, USA.
*
*Corresponding author: yuka.esashi@colorado.edu

Abstract

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Type
Advances in Phase Retrieval Microscopy
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 116 - 117
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Miao, J., et al. , Science 348 (2015), p. 530-535.Google Scholar
[2]Maiden, A. M. and Rodenburg, J. M., Ultramicroscopy 109 (2009), p. 1256-1262.Google Scholar
[3]Shanblatt, E. R., et al. , Nano letters 16 (2016), p. 5444-5450.Google Scholar
[4]Gardner, D. F., et al. , Nature Photonics 11 (2017), p. 259-263.Google Scholar
[5]Karl, R. M., et al. , Science Advances 4 (2018), eaau4295.Google Scholar
[6]Porter, C.L., et al. , Optica 4 (2017), p. 1552-1557.Google Scholar
[7]The authors gratefully acknowledge support from NSF STROBE DMR-1548924, DARPA STTR Award # W31P4Q-17-C-0104, a Gordon and Betty Moore Foundation EPiQS Initiative through Grant GBMF4538, an NSF GRFP fellowship, and a NDSEG fellowship. H.K. and M.M. are partial owners of KMLabs.Google Scholar