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Quantifying Real-Time Sample Temperature Under the Gas Environment in the Transmission Electron Microscope Using a Novel MEMS Heater

Published online by Cambridge University Press:  21 May 2021

Meng Li Open the ORCID record for Meng Li [Opens in a new window] ,
De-Gang Xie ,
Xi-Xiang Zhang ,
Judith C. Yang  and
Zhi-Wei Shan
Meng Li*
Affiliation:
Center for Advancing Materials Performance from the Nanoscale (CAMP-Nano), State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China Department of Chemical and Petroleum Engineering, University of Pittsburgh, Pittsburgh, PA15260, USA
De-Gang Xie
Affiliation:
Center for Advancing Materials Performance from the Nanoscale (CAMP-Nano), State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
Xi-Xiang Zhang
Affiliation:
Division of Physical Science and Engineering, King Abdullah University of Science & Technology (KAUST), Thuwal23955-6900, Saudi Arabia
Judith C. Yang
Affiliation:
Department of Chemical and Petroleum Engineering, University of Pittsburgh, Pittsburgh, PA15260, USA
Zhi-Wei Shan*
Affiliation:
Center for Advancing Materials Performance from the Nanoscale (CAMP-Nano), State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
*
*Authors for correspondence: Meng Li, E-mail: mona.mengli@gmail.com; Zhi-Wei Shan, E-mail: zwshan@mail.xjtu.edu.cn
*Authors for correspondence: Meng Li, E-mail: mona.mengli@gmail.com; Zhi-Wei Shan, E-mail: zwshan@mail.xjtu.edu.cn
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Abstract

Accurate control and measurement of real-time sample temperature are critical for the understanding and interpretation of the experimental results from in situ heating experiments inside environmental transmission electron microscope (ETEM). However, quantifying the real-time sample temperature remains a challenging task for commercial in situ TEM heating devices, especially under gas conditions. In this work, we developed a home-made micro-electrical-mechanical-system (MEMS) heater with unprecedented small temperature gradient and thermal drift, which not only enables the temperature evolution caused by gas injection to be measured in real-time but also makes the key heat dissipation path easier to model to theoretically understand and predict the temperature decrease. A new parameter termed as “gas cooling ability (H)”, determined purely by the physical properties of the gas, can be used to compare and predict the gas-induced temperature decrease by different gases. Our findings can act as a reference for predicting the real temperature for in situ heating experiments without closed-loop temperature sensing capabilities in the gas environment, as well as all gas-related heating systems.

Keywords

environmental TEM (ETEM)gas cooling effectin situ heatingMEMS heatertemperature measurement
Type
Software and Instrumentation
Information
Microscopy and Microanalysis , Volume 27 , Issue 4 , August 2021 , pp. 758 - 766
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

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