Hostname: page-component-78c5997874-j824f Total loading time: 0 Render date: 2024-11-14T17:30:54.206Z Has data issue: false hasContentIssue false
  • English
  • Français

RDF Analysis of Radiation-Amorphized SiC using a field Emission Scanning Electron Microscope

Published online by Cambridge University Press:  02 July 2020

David C. Bell ,
Anthony J. Garratt-Reed  and
Linn W. Hobbs
David C. Bell
Affiliation:
Centerfor Materials Science and Engineering, Cambridge, MA, 02139
Anthony J. Garratt-Reed
Affiliation:
Centerfor Materials Science and Engineering, Cambridge, MA, 02139
Linn W. Hobbs
Affiliation:
Department of Materials Science and Engineering Massachusetts Institute of Technology, Cambridge, MA, 02139
Get access

Extract

Abstract

Fast electrons are a particularly useful chemical and structural probe for the small sample volumes associated with ion- or fast electron-irradiation-induced amorphization, because of their much stronger interaction with matter than for X-rays or neutrons, and also because they can be readily focused to small probes. Three derivative signals are particularly rich in information: the angular distribution of scattered electrons (which is utilized in both diffraction and imaging studies); the energy loss spectrum of scattered electrons (electron energy loss spectroscopy, or EELS); and the emission spectrum of characteristic X-rays resulting from ionization energy losses (energy dispersive X-ray spectroscopy, or EDXS). We have applied the first two to the study of three amorphized compounds (AIPO4, SiO2, SiC) using MIT's Vacuum Generators HB603 field-emission (FEG) scanning transmission electron microscope (STEM), operating at 250 kV and equipped with a Gatan digital parallel-detection electron energy-loss spectrometer (digiPEELS).

Type
Nanophase and Amorphous Materials
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 700 - 701
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

References:

1Weber, W. J. and Wang, L.-M., Nucl. Instrum. Meth. B 106 (1995) 298; Weber, W. J., Wang, L.-M. and N. Yu, Nucl. Instrum. Meth. B 116 (1996) 322.CrossRefGoogle Scholar
2Snead, L. L. and Zinkle, S. J., Mater. Res. Soc. Symp. Proc. 439 (1997) 595.CrossRefGoogle Scholar
3Allen, C. W., Funk, L. L., Ryan, E.A. and Ockers, S. T., Nucl. Instrum. Meth. B 40 & 41 (1989) 553.CrossRefGoogle Scholar
4Cockayne, D. J. H. and MacKenzie, D. R., Acta Cryst. A44 (1988) 870.CrossRefGoogle Scholar