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Reverse Flow Pressure Limiting Aperture

Published online by Cambridge University Press:  08 August 2002

Gerasimos D. Danilatos*
Affiliation:
ESEM Research Laboratory, 98 Brighton Boulevard, North Bondi, New South Wales 2026, Australia
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Abstract

The reverse flow pressure limiting aperture is a device that creates and sustains a substantial gas pressure difference between two chambers connected via an aperture. The aperture is surrounded by an annular orifice leading to a third chamber. The third chamber is maintained at a relatively high pressure that forces gas to flow through the annular aperture into the first of said two chambers. The ensuing gas flow develops into a supersonic annular gas jet, the core of which is coaxial with the central aperture. A pumping action is created at the core of the jet and any gas molecules leaking through the aperture from the second chamber are entrained and forced into the first chamber, thus creating a substantial pressure difference between the first and second chamber.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2000

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